Alpha-Step Profilometer

    Facility/equipment: EquipmentCenter for Micro/Nano Science and Technology

    • Location

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701

    Description

    Alpha-step profilometer is to measure the profile of specimen by which we can obtain the roughness information and judge the certainly precision. The tip probe of apparatus made by dismond is used to obtain the surface information via scanning the surface of specimen. As the trace motion of tip probe cross the surface specimen, the conductor sensor will record the vibration of vertical motion of tip probe. By the signal, the 2-D surface profile of measured specimen is achieved.

    Details

    NameAlpha-Step Profilometer
    Acquisition date04-09-10

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    profilometers
    probes
    vertical motion
    profiles
    roughness
    conductors
    vibration
    scanning
    sensors