Among various kinds of alternative patterning technologies, nano-imprinting lithography can fabricate the nanosized patterns with high throughput and does not require the complicated equipment and process. Hence, it can fabricate the nano-sized patterns on a large substrate with relatively low cost. Recently developed monomer based UV curing imprinting lithography can produce the patterns at much lower pressure and temperature.
|Name||Double-Side Mask Aligner/UV Imprinter|
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