Dual Beam-Focused Ion Beam I, FEI Nova-200

    Facility/equipment: EquipmentCenter for Micro/Nano Science and Technology

    • Location

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701

      Taiwan

    Description

    Focused Ion Beam (FIB) systems utilize a finely focused beam of gallium ions operated at low-beam currents for imaging and at high-beam currents for site-specific milling. The generated secondary electrons (or ions) are collected to form an image of the surface of the sample. The ion beam allows the milling of small holes in the sample at well localized sites, so that cross-sectional images of the structure can be obtained or that modifications in the structures can be made.

    Details

    NameDual Beam-Focused Ion Beam I, FEI Nova-200
    Acquisition date07-07-19

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    beam currents
    ion beams
    gallium
    ions
    electrons