Ellipsometery

    Center for Micro/Nano Science and Technology

    Facility/equipment: Equipment › Center for Micro/Nano Science and Technology

    • LocationShow on map

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701

      Taiwan

    Equipments Details

    Description

    利用橢圓偏光量測透明或半透明之薄膜，藉由量測到之偏極光的狀態改變，量測薄膜的膜厚〈量測範圍約數奈米~數微米之厚度〉、折射率及消光係數相關等資訊

    Details

    NameEllipsometery
    Acquisition date11-06-08

    Contact information

    LinksWebsite

    Terms of loan/booking

    Available for loan - internal and external