FE-SEM I w EDS/CL/EBW, JEOL JSM-7000F

    Facility/equipment: EquipmentCenter for Micro/Nano Science and Technology

    • Location

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701

      Taiwan

    Description

    This high resolution thermal FE-SEM is suitble for observation and analyses of fine structures due to the special designed objective lens and the highly stable electron probe current generated by in-lens thermal field emission electron gun. Under high magnifications, secondary electron images(SEI) and backscattering electron images(BEI) of the surface morphology of metallic and electronic materials can be observed. This high resolution thermal FESEM is equipped with energy dispersive spectoscopy(EDS) and cathodoluminescence (CL) for elemental analyses and optical characterization of the samples. An electron beam lithography system is also attached to the SEM for producing micro and nanostructures.

    Details

    NameFE-SEM I w EDS/CL/EBW, JEOL JSM-7000F

    Fingerprint

    cathodoluminescence
    lenses
    scanning electron microscopy
    high resolution
    electron guns
    electron probes
    thermal emission
    magnification
    field emission
    backscattering
    electrons
    lithography
    fine structure
    electron beams
    energy
    electronics