This high resolution thermal FE-SEM is suitble for observation and analyses of fine structures due to the special designed objective lens and the highly stable electron probe current generated by in-lens thermal field emission electron gun. Under high magnifications, secondary electron images(SEI) and backscattering electron images(BEI) of the surface morphology of metallic and electronic materials can be observed. This high resolution thermal FESEM is equipped with energy dispersive spectoscopy(EDS) and cathodoluminescence (CL) for elemental analyses and optical characterization of the samples. An electron beam lithography system is also attached to the SEM for producing micro and nanostructures.
|Name||FE-SEM I w EDS/CL/EBW, JEOL JSM-7000F|
scanning electron microscopy