FE-SEM II w EDS/EBSD, JEOL JSM-7001F

    Facility/equipment: EquipmentCenter for Micro/Nano Science and Technology

    • Location

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701

      Taiwan

    Description

    This high resolution thermal FE-SEM is suitable for observation and analyses of fine structures due to the special designed objective lens and the highly stable electron probe current generated by in -lens thermal field emission electron gun. Under high magnifications, secondary electron images (SEI) and backscattering electron images (BEI) of the surface morphology of metallic and electronic material can be observed. This high resolution thermal filed emission SEM is equipped with energy dispersive spectroscopy (EDS) and EBSD.EDS can provide rapid qualitative and quantitative analysis of elemental composition. EBSD could calculate the orientation of thespecimen from Kikuchi pattern. With the help of the automatic OIM Collection software, orientation mapping over wholespecimen is possible. Further orientation information of the scan area could be processed by the software, OIM Analysis, forquantities texture analysis such as "ODF,Orientation Distribution Function", "Pole Figure", and "Inverse Pole Figure".

    Details

    NameFE-SEM II w EDS/EBSD, JEOL JSM-7001F
    Acquisition date04-12-08

    Fingerprint

    scanning electron microscopy
    spectroscopy
    electron
    energy
    software
    qualitative analysis
    quantitative analysis
    texture
    probe
    analysis