This high resolution thermal FE-SEM is suitable for observation and analyses of fine structures due to the special designed objective lens and the highly stable electron probe current generated by in -lens thermal field emission electron gun. Under high magnifications, secondary electron images (SEI) and backscattering electron images (BEI) of the surface morphology of metallic and electronic material can be observed. This high resolution thermal filed emission SEM is equipped with energy dispersive spectroscopy (EDS) and EBSD.EDS can provide rapid qualitative and quantitative analysis of elemental composition. EBSD could calculate the orientation of thespecimen from Kikuchi pattern. With the help of the automatic OIM Collection software, orientation mapping over wholespecimen is possible. Further orientation information of the scan area could be processed by the software, OIM Analysis, forquantities texture analysis such as "ODF,Orientation Distribution Function", "Pole Figure", and "Inverse Pole Figure".
|Name||FE-SEM II w EDS/EBSD, JEOL JSM-7001F|
scanning electron microscopy