ICP RIE System

    Facility/equipment: EquipmentCenter for Micro/Nano Science and Technology

    • LocationShow on map

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701

      Taiwan

    Equipments Details

    Description

    Disco DAD-321 切割機是日本 Disco 公司的產品, 它在半導體晶圓及微機電系統製造完成過渡到電子構裝的過程當中扮演重要的角色。

    Details

    NameICP RIE System
    Acquisition date13-12-30