Micro-Raman & Micro-PL Spectrometer

    Facility/equipment: EquipmentCenter for Micro/Nano Science and Technology

    • Location

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701

      Taiwan

    Description

    The increasing densification and miniaturisation of devices in microelectronics components demands analytical techniques with a very high spatial resolution, in general higher than the limit set by far field diffraction of visible light. This offers a problem for optical techniques, such as micro-Raman spectroscopy (µRS). µRS takes an important place for the measurement of local mechanical stress. In this technique, the light beam of a laser is focused through an optical microscope on the sample. The scattered light is collected through the same microscope and directed into a spectrometer, and send to a CCD detector, to analyse the spectrum. A typical Raman instrument is shown in Fig. 1. It is clear that this is a rather complex optical instrument.

    Details

    NameMicro-Raman & Micro-PL Spectrometer
    Acquisition date04-05-26

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    Raman spectroscopy
    spectrometers
    miniaturization
    densification
    optical microscopes
    light beams
    microelectronics
    far fields
    charge coupled devices
    spatial resolution
    microscopes
    high resolution
    detectors
    diffraction
    lasers