Parylene Vapor Deposition System

    Facility/equipment: EquipmentCenter for Micro/Nano Science and Technology

    • LocationShow on map

      No.1, University Road, Tainan City 701, Taiwan (R.O.C.) 701


    Equipments Details


    Parylene is a macromolecular material which has high tensile and yield strength. It provides exceptional corrosion protection from moisture, salt spray, corrosive vapors and other hostile environments. Parylene coatings remain stable at continuous temperatures as high as 130 °C in air, and it is practically insoluble in all known organic solvents up to 150 °C. Also, it is very resistant to most of the inorganic reagents including strong acids and alkali. Parylene provides coatings with a friction coefficient which ranges from 0.25 to 0.33 so that the lubricity is close to that of Teflon.


    NameParylene Vapor Deposition System
    Acquisition date02-07-11


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