Center for Micro/Nano Science and Technology

Research Output 1982 2019

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Conference contribution
2018

Effect of different partial pressure on Ga-doped ZnO UV photodetectors by RF sputtering

Tung, W. J., Yang, C. C., Chang, S. P., Hsu, M. H., Chiu, C. H., Lin, C. H., Cheng, T. H. & Chang, S. J., 2018 Jun 22, Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photodetectors
Partial pressure
Sputtering
partial pressure
photometers
1 Citation (Scopus)

Optical and photo-electrical properties of zinc tin oxide thin-film phototransistor

Yang, C. C., Tung, W. J., Chang, S. P., Hsu, M. H., Huang, W. L., Li, C. H., Fang, Y. J. & Chang, S. J., 2018 Jun 22, Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Phototransistors
phototransistors
Drain current
Photodetectors
Zinc oxide
1 Citation (Scopus)

The development of low-temperature atomic layer deposition of hfo2 for tem sample preparation on soft photo-resist substrate

Peng, K. P., Liu, Y. C., Lin, I. F., Lin, C-C., Huang, S. W. & Ting, C. C., 2018 Aug 30, IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits. Institute of Electrical and Electronics Engineers Inc., 8452177. (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA; vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Atomic layer deposition
Hafnium
Transmission electron microscopy
Substrates
Depth profiling
2017

Wafer size MOS2 with few monolayer synthesized by H2S sulfurization

Ho, Y. T., Chu, Y. C., Wei, L. L., Luong, T. T., Lin, C-C., Cheng, C. H., Hsu, H. R., Tu, Y. Y. & Chang, E. Y., 2017 May 4, China Semiconductor Technology International Conference 2017, CSTIC 2017. Liang, S., Shi, Y., Huang, R., Lin, Q., Huang, D., Wu, H., Wang, Y., Claeys, C., Lai, K., Zhang, Y., Song, P., Shi, V. & Guo, Z. (eds.). Institute of Electrical and Electronics Engineers Inc., 7919883. (China Semiconductor Technology International Conference 2017, CSTIC 2017).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Monolayers
Thin films
Networks (circuits)
Photoluminescence
Furnaces
2 Citations (Scopus)

Zero-valent iron based nanoparticles selectively inhibit cancerous cells through mitochondria-mediated autophagy

Shieh, D-B., Yang, L. X., Lee, W. T., Huang, K. J., Wu, Y. N., Su, W-C., Chen, D-H. & Tsang, B., 2017 Nov 21, 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017. Institute of Electrical and Electronics Engineers Inc., p. 168-170 3 p. 8117431. (2017 IEEE 17th International Conference on Nanotechnology, NANO 2017).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mitochondria
Iron
Cells
Nanoparticles
Antineoplastic Agents
2016

Structure of GaAsN alloy within miscibility gap

Wu, H. M., Lin, K-I. & Lin, H. H., 2016 Aug 12, 2016 5th International Symposium on Next-Generation Electronics, ISNE 2016. Institute of Electrical and Electronics Engineers Inc., 7543310. (2016 5th International Symposium on Next-Generation Electronics, ISNE 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Solubility
Energy gap
Substrates
Molecular beam epitaxy
Electron diffraction
2014
6 Citations (Scopus)

20.63 % nPERT cells and 20% PR gain bifacial module

Yu, S. H., Huang, C. J., Hsieh, P. T., Chang, H. C., Mo, W. C., Peng, Z. W., Lai, C. W. & Li, C. C., 2014 Oct 15, 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., p. 2134-2137 4 p. 6925347. (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Boron
Metallizing
Conversion efficiency

Effect of oxygen partial pressure on electrical characteristics of amorphous zinc-tin-oxide thin-film transistors

Chang, S. P., 2014 Jan 1, Innovative Solutions in the Field of Engineering Sciences. Trans Tech Publications Ltd, p. 229-233 5 p. (Applied Mechanics and Materials; vol. 590).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Thin film transistors
Zinc oxide
Tin oxides
Partial pressure
Oxide films
2013

Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition

Chang, S-P., Chen, K-J., Kuo, P. J. & Chiou, Y. Z., 2013 Jan 24, Frontiers of Manufacturing and Design Science III. PART 1 ed. p. 190-196 7 p. (Applied Mechanics and Materials; vol. 271, no. PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Organic chemicals
Surface treatment
Chemical vapor deposition
Annealing
Metals
2 Citations (Scopus)

Fabrication of simple GaAs solar cell by Zn diffusion method

Chang, S. P., 2013 Jun 3, Advances in Applied Materials and Electronics Engineering II. p. 312-316 5 p. (Advanced Materials Research; vol. 684).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Solar cells
Fabrication
Substrates
Surface morphology
Cleaning

Fabrication of TiO2 nanotube arrays in ethylene glycol electrolyte by the electrochemical anodization method

Liu, R., Qiang, L. S., Yang, W. D. & Liu, H-Y., 2013 Mar 15, Advanced Engineering and Materials. p. 31-34 4 p. (Applied Mechanics and Materials; vol. 302).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ethylene glycol
Nanotubes
Electrolytes
Fabrication
Field emission
4 Citations (Scopus)

Fabrication of ZnO nanowall-based hydrogen gas nanosensor

Chen, T. P., Chang, S. P. & Chang, S. J., 2013 Jun 5, Advances in Applied Materials and Electronics Engineering II. p. 21-25 5 p. (Advanced Materials Research; vol. 684).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanosensors
Fabrication
Hydrogen
Substrates
Gases
2012
1 Citation (Scopus)

Amorphous IGZO nonvolatile memory thin film transistors using Ta 2O 5 gate dielectric

Chiu, C. J., Chang, S. P., Weng, W. Y. & Chang, S. J., 2012 Apr 2, Nanotechnology and Advanced Materials. p. 233-238 6 p. (Advanced Materials Research; vol. 486).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gate dielectrics
Thin film transistors
Data storage equipment
Gallium
Zinc oxide
1 Citation (Scopus)

Effects of sputtering power on optical and electrical properties of al-doped ZnO thin film on flexible substrates

Hsieh, P. T., Li, T. C., Chung, C. J., Peng, H. S. & Lin, J. F., 2012 Nov 26, Advanced Manufacturing Focusing on Multi-Disciplinary Technologies. p. 118-123 6 p. (Advanced Materials Research; vol. 579).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sputtering
Electric properties
Optical properties
Thin films
Polyethylene terephthalates

Investigation of efficiency droop for InGaN-based LEDs with carrier localization state and polarization effect

Yu, S. F., Chang, S. J. & Chang, S. P., 2012 Dec 1, 2012 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2012. (2012 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2012).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Quantum efficiency
Light emitting diodes
Polarization
Wavelength
Piezoelectricity
3 Citations (Scopus)

Room-temperature ZnO nanoparticle ethanol gas sensors under UV illumination

Chang, S-P., 2012 Apr 2, Nanotechnology and Advanced Materials. p. 39-43 5 p. (Advanced Materials Research; vol. 486).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zinc oxide
Chemical sensors
Ethanol
Lighting
Nanoparticles
2011
1 Citation (Scopus)

Effects of oxygen contents in the active channel layer on electrical characteristics of IGZO-based thin film transistors

Chiu, C. J., Chang, S. P., Lu, C. Y., Su, P. Y. & Chang, S. J., 2011 Dec 1, Physics of Semiconductors - 30th International Conference on the Physics of Semiconductors, ICPS-30. p. 931-932 2 p. (AIP Conference Proceedings; vol. 1399).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

films (materials)
transistors
oxygen
polymers
thin films
3 Citations (Scopus)

High-performance a-IGZO thin-film transistor with organic polymer dielectric layer

Chiu, C. J., Chang, S. P., Lu, C. Y., Su, P. Y. & Chang, S. J., 2011 Dec 1, Physics of Semiconductors - 30th International Conference on the Physics of Semiconductors, ICPS-30. p. 929-930 2 p. (AIP Conference Proceedings; vol. 1399).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

indium
gallium
zinc oxide
gallium oxides
films (materials)

Investigation of acoustic properties and Raman scattering of AlN films for biosensor application

Chung, C. J., Hsieh, P. T., Lin, J. F., Wei, C. L., Chang, W. T., Chen, C. T., Chen, Y. C., Cheng, C. C., Lin, C. H., Chiu, K. C., Chen, S. J. & Kao, K. S., 2011 Oct 4, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 618-621 4 p. 6017431. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

acoustic properties
aluminum nitrides
bioinstrumentation
Raman spectra
scattering

The photocatalytic characteristics of TiO2 films: An expeditious evaluation

Kao, K. S., Shih, W. C., Cheng, D. L., Kuo, P. H., Hung, P. S., Chan, C. Y., Wang, C. M. & Hsieh, P-T., 2011 Mar 17, Advanced Engineering Materials. p. 2050-2053 4 p. (Advanced Materials Research; vol. 194-196).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photocatalysts
Mercury vapor lamps
Rapid thermal annealing
Opacity
Sol-gel process
2010

Electrochromic properties of nano-columnar nickel oxide

Wang, C. M., Kao, K. S., Cheng, D. L., Cheng, C. C., Hsieh, P-T., Lin, S. Y., Shih, T. Y. & Wen, C. Y., 2010 Aug 17, PRICM7. p. 1904-1907 4 p. (Materials Science Forum; vol. 654-656).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nickel oxide
nickel oxides
Oxide films
oxide films
Electrochromic devices

Investigation on the mechanical properties of molybdenum-doped zinc oxide transparent thin film by sputtering technique

Chen, T. H., Hsieh, P. T., Huang, C. Y., Wang, J. Q. & Chuang, R. W., 2010 Aug 17, PRICM7. p. 1756-1759 4 p. (Materials Science Forum; vol. 654-656).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zinc Oxide
Molybdenum
Zinc oxide
zinc oxides
molybdenum

Synthetic properties of the c-axis tilted AlN thin films

Chung, C. J., Wei, C. L., Hsieh, P. T., Huang, C. Y., Lin, J. F., Chen, Y. C. & Cheng, C. C., 2010 Aug 17, PRICM7. p. 1780-1783 4 p. (Materials Science Forum; vol. 654-656).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aluminum nitride
aluminum nitrides
Thin films
thin films
Crystal orientation

The comprehensive characteristics of quaternary AlInGaN with various TMI molar rate

Yu, S. F., Chang, S. J., Chang, S. P. & Lin, R. M., 2010 May 7, Gallium Nitride Materials and Devices V. 76020B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7602).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Heterostructures
Epilayers
MOCVD
quaternary alloys
Surface Morphology
2009

Enhanced vertical emission from GaN based light emitting diode with ZnO nanorod arrays produced by hydrothermal method

Dalui, S., Lin, C. C., Lee, H. Y. & Lee, C. T., 2009, State-of-the-Art Program on Compound Semiconductors 51, SOTAPOCS 51 and Wide-Bandgap Semiconductor Materials and Devices 10. 12 ed. Vol. 25. p. 49-53 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanorods
Light emitting diodes
Cones
Temperature

Extremely strong UV emission of yttrium doped ZnO films derived by Sol-Gel technology

Hsieh, P-T., Wang, C. M. & Wei, C. L., 2009 Dec 1, 11th International Conference and Exhibition of the European Ceramic Society 2009. p. 287-290 4 p. (11th International Conference and Exhibition of the European Ceramic Society 2009; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yttrium
Sol-gels
Thin films
Annealing
Photoluminescence

Optical and electrical properties of ZnO/Pt/ZnO multilayer coatings using Sol-Gel technology

Hsieh, P-T., Kao, K. S., Chen, Y. C., Lee, M. S. & Tsai, Y. T., 2009 Dec 1, 11th International Conference and Exhibition of the European Ceramic Society 2009. p. 338-340 3 p. (11th International Conference and Exhibition of the European Ceramic Society 2009; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sol-gels
Multilayers
Electric properties
Optical properties
Thin films

Structural and electrical properties of CaCu3Ti4O12 films by room temperature sputtering and rapid thermal annealing process

Wang, C. M., Hsieh, P-T., Lin, S. Y., Wei, C. L. & Wen, C. Y., 2009 Dec 1, 11th International Conference and Exhibition of the European Ceramic Society 2009. p. 332-337 6 p. (11th International Conference and Exhibition of the European Ceramic Society 2009; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rapid thermal annealing
Sputtering
Structural properties
Electric properties
Annealing

The influence of illumination positions on UV detection of a ZnO/Si layered SAW oscillator

Wei, C. L., Chen, Y. C., Wang, C. M., Hsieh, P. T. & Cheng, P. S., 2009 Dec 1, 11th International Conference and Exhibition of the European Ceramic Society 2009. p. 155-159 5 p. (11th International Conference and Exhibition of the European Ceramic Society 2009; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Acoustic surface wave devices
Surface waves
High frequency amplifiers
Lighting
Acoustic waves
2008
1 Citation (Scopus)

GaN photodetectors prepared on silicon and sapphire substrates

Chang, S. P., Chang, S. J., Lu, C. Y. & Chuang, R. W., 2008 Dec 1, 2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC. 4760697. (2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photodetectors
Sapphire
Silicon
Substrates
Dark currents
1 Citation (Scopus)

Mechanisms and high performances of chlorine-treated GaN ultraviolet photodetectors

Lee, C. T., Lee, H. Y., Lin, C. C. & Chen, P. S., 2008 Mar 31, Optoelectronic Devices and Integration II. 68380M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6838).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chlorination
Chlorine
Photodetector
Photodetectors
Ultraviolet
1 Citation (Scopus)

The resonance characteristics of solidly mounted resonators with 1/2 λ and 1/4 λ configurations

Wei, C. L., Chen, Y. C., Cheng, C. C., Wang, C. M., Kao, K. S. & Hsieh, P-T., 2008 Nov 13, 2008 IEEE International Frequency Control Symposium, FCS. p. 209-212 4 p. 4622991. (2008 IEEE International Frequency Control Symposium, FCS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Resonators
Acoustic impedance
Thin films
Film thickness
Bragg reflectors

ZnO nanowire-based oxygen gas sensor

Lu, C. Y., Chang, S. P. & Chang, S. J., 2008 Dec 1, 2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC. 4760698. (2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Oxygen sensors
Chemical sensors
Nanowires
Oxygen
High resolution transmission electron microscopy
2007
1 Citation (Scopus)

Conjugate polymer induced enhancement of THz radiation in semiconductors

Hwang, J. S., Lin, H. C., Lin, K. I., Guo, T. F. & Chang, J. W., 2007 Dec 1, ECS Transactions - 47th State-of-the-Art Program on Compound Semiconductors (SOTAPOCS 47) and the 8th Symposium on Wide Bandgap Semiconductor Materials and Devices. 5 ed. p. 59-74 16 p. (ECS Transactions; vol. 11, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor materials
Radiation
Polymers
Interface states
Surface states
1 Citation (Scopus)

Effects of substrate residue on the frequency response of high-tone bulk acoustic resonator

Lin, R. C., Chen, Y. C., Hsieh, P-T., Kao, K. S. & Wang, C. M., 2007 Dec 1, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS. p. 695-698 4 p. 4319164. (Proceedings of the IEEE International Frequency Control Symposium and Exposition).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Acoustic resonators
Frequency response
Substrates
Dry etching
Electric network analyzers

Fabrication of crack-free metal-semiconductor-metal ultraviolet photodetectors on Si (111) substrates based on novel AlN/AlGaN buffer multilayer scheme

Chang, S. P., Chuang, R. & Chang, S. J., 2007 Dec 1, ECS Transactions - 47th State-of-the-Art Program on Compound Semiconductors (SOTAPOCS 47) and the 8th Symposium on Wide Bandgap Semiconductor Materials and Devices. 5 ed. p. 117-128 12 p. (ECS Transactions; vol. 11, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photodetectors
Multilayers
Semiconductor materials
Cracks
Fabrication

GaN MESFET growth on vicinal sapphire by MOVPE

Chang, S. J., Huang, C. C., Lin, J. C., Chang, S. P., Cheng, Y. C. & Lin, W. J., 2007 Dec 1, 2007 International Semiconductor Device Research Symposium, ISDRS. 4422370. (2007 International Semiconductor Device Research Symposium, ISDRS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Metallorganic vapor phase epitaxy
Sapphire

Studies of the critical electric field and L valley offset of a semiconductor characterized by terahertz radiation

Hwang, J. S., Lin, H. C., Chang, C. K., Wang, T. S., Lin, K. I., Chang, L. S. & Lu, Y-T., 2007 May 23, Terahertz and Gigahertz Electronics and Photonics VI. 647203. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6472).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

valleys
Semiconductors
Electric Field
Radiation
Electric fields
1 Citation (Scopus)

The characteristics of transparent Metal-ZnO contacts and ZnO-based photodiodes

Chiou, Y. Z., Lin, T. K., Lu, C. Y., Chang, S. P., Wang, C. K., Kuo, C. F. & Chang, H. M., 2007 May 24, Zinc Oxide Materials and Devices II. 64741A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6474).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photodiode
Photodiodes
Annealing
photodiodes
Metals
2005

Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process

Hsieh, P. T., Chen, Y. C., Wang, C. M., Tsai, Y. Z. & Hu, C. C., 2005 Dec 1, 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005. p. 849-850 2 p. 1548274. (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Studies of terahertz radiation from InAlAs and GaAs surface intrinsic-N+ structures and the critical electric fields of semiconductors

Hwang, J. S., Lin, H. G., Lin, K. I., Wang, T. S. & Lu, Y. T., 2005 Dec 1, International Quantum Electronics Conference 2005. p. 1338-1339 2 p. 1561093. (IQEC, International Quantum Electronics Conference Proceedings; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

electric fields
radiation
valleys
estimating
2003

Plasma resistance and behavior of polybenzoxazine polymer

Chen, J. K., Lin, K-I., Ko, F. H., Chang, F. C. & Chen, F. C., 2003 Jan 1, Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003. Institute of Electrical and Electronics Engineers Inc., p. 260-261 2 p. 1268745. (Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Curing
Plasmas
Phenolic resins
Water absorption
Polymers