Chen-Kuei Chung

Professor

  • 1722 Citations
  • 21 h-Index
1992 …2020
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Engineering & Materials Science

Fabrication
Microstructure
Aluminum
Annealing
Thin films
Lasers
Temperature
Oxides
Polydimethylsiloxane
Hardness
Microfluidics
Etching
Silicon
Substrates
Rapid thermal annealing
Nickel
Ultrahigh vacuum
Sputtering
Glass
Photoluminescence
Laser ablation
Micromachining
Electroforming
Nanoparticles
Multilayers
MEMS
Alumina
Mechanical properties
Processing
Oxide films
Amorphous silicon
Metals
Microchannels
Crystalline materials
Nitrogen
Silicon carbide
Current density
Surface roughness
Reactive ion etching
Cobalt
Polymers
Oxalic acid
Reynolds number
Taguchi methods
Residual stresses
Carbon
Scanning
Ablation
Nanoindentation
Chemical analysis

Chemical Compounds

Aluminum Oxide
Fabrication
Microstructure
Annealing
Thin films
Temperature
Aluminum
Silicon
Lasers
Nickel
Hardness
Substrates
Photoluminescence
Ultrahigh vacuum
Microfluidics
Rapid thermal annealing
Electroforming
Multilayers
Sputtering
Metals
Amorphous silicon
Micromachining
Nanoparticles
Glass
Oxalic Acid
Polymers
Oxide films
Etching
Crystallization
Microchannels
Carbon
MEMS
Current density
Nitrogen
Nanoindentation
Residual stresses
Cobalt
Nanocomposite films
Polymethyl Methacrylate
Humidity sensors
Carrier mobility
Surface roughness
Photoresists
Processing
Mechanical properties
Chemical analysis
Magnetron sputtering
Laser ablation
Oxides
Thermodynamic stability

Physics & Astronomy

General

microstructure
thin films
chips
pulses
lasers
microchannels
porosity
augmentation
simulation
thermal stability
meanders
oxide films
fluidics
photoresists
Taguchi methods
purity

Engineering

fabrication
annealing
electroforming
etching
electrical resistivity
laser annealing
sputtering
microelectromechanical systems
coatings
modules
manufacturing
residual stress
magnetron sputtering

Chemistry and Materials

aluminum oxides
nickel
hardness
aluminum
amorphous silicon
titanium oxides
oxalic acid
silicon
polymers
cobalt
carbon
nanocomposites
mechanical properties
silicon carbides
glass

Physics

ultrahigh vacuum
temperature
photoluminescence
room temperature
current density
nanoparticles