Chen-Kuei Chung

Professor

  • 1722 Citations
  • 21 h-Index
1992 …2020
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Research Output 1992 2020

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Conference contribution
2015
3 Citations (Scopus)

Fabrication of biodegradable polymer microneedle array via CO2 laser ablation

Tu, K. T. & Chung, C-K., 2015 Jul 1, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., p. 494-497 4 p. 7147476. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Biodegradable polymers
Laser ablation
Fabrication
Lasers
Processing

Fabrication of microfluidic chip using foil-assisted CO2 laser ablation for suspended particles separation

Long, H. P., Lai, C. C. & Chung, C-K., 2015 Jul 1, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., p. 259-262 4 p. 7147422. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser ablation
Microfluidics
Metal foil
Fabrication
Lab-on-a-chip

Fabrications of electroless Ni-P composite coatings before and after annealing and tribological analyses

Chang, C. S., Hou, K. H., Ger, M. D., Chung, C-K. & Lin, J-F., 2015 Jan 1, Tribology Engineering. Horng, J-H., Wei, C-C. & Hwang, Y-L. (eds.). Trans Tech Publications Ltd, p. 286-291 6 p. (Key Engineering Materials; vol. 642).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Composite coatings
Hardness
Annealing
Fabrication
Plating

Simulation and experiment of capillary driven passive planar baffle micro-mixer

Liang, B. T., Lai, C. C. & Chung, C. K., 2015 Jul 1, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., p. 120-123 4 p. 7147388. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser ablation
Flow visualization
Charge coupled devices
Microfluidics
Experiments
2014

Selective patterning of indium tin oxide films using 1064 nm laser for micro parts processing

Tu, K. T. & Chung, C-K., 2014 Sep 23, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc., p. 382-385 4 p. 6908832. (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tin oxides
Indium
Oxide films
Lasers
Electroforming
2013

Fabrication of copper nanowires by eelectrodeposition uusing anodic aluminum oxide template

Chung, C-K., Yang, C. Y., Liao, M. W. & Li, S. L., 2013 Sep 2, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. p. 1072-1075 4 p. 6559907. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanowires
Aluminum Oxide
Copper
Fabrication
Hydrogen

Simulation and fabrication of capillary-driven meander micromixer for short-distance mixing

Chung, C-K., Lai, C. C., Shih, T. R. & Chang, E. C., 2013 Sep 2, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. p. 1279-1282 4 p. 6559951. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Glass
Fabrication
Surface Properties
Syringes
Medicine
2011
3 Citations (Scopus)

Design and fabrication of an advanced rhombic micromixer with branch channels

Chang, C. K., Shih, T. R. & Chung, C-K., 2011 Oct 4, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 245-248 4 p. 6017340. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

fabrication
microchannels
simulation
fluid dynamics
charge flow devices

Experiment and simulation of resistance of nanoporous dentin biomaterial to CO2 laser irradiation

Lin, S. L., Wang, H. Y., Chung, C. K. & Chuang, S. F., 2011 Oct 4, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 611-614 4 p. 6017429. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

irradiation
scanning
lasers
teeth
simulation
1 Citation (Scopus)

Numerical analysis and experiments of capillarity-driven microfluid chip

Chang, C. K., Lai, C. C. & Chung, C-K., 2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 1032-1035 4 p. 6017532

Research output: Chapter in Book/Report/Conference proceedingConference contribution

numerical analysis
chips
viscosity
fluidics
microchannels
1 Citation (Scopus)

The effect of sol-gel composition ratio on phase transformation of titanium dioxide under CO2 laser annealing

Lin, S. L., Wang, H. Y., Chung, C. K. & Chuang, S. F., 2011 Oct 4, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 1100-1103 4 p. 6017548. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

laser annealing
titanium oxides
phase transformations
gels
substructures
2010
1 Citation (Scopus)

Application of pulse voltage for enhancing uniform nano-structured anodic aluminum oxide

Chung, C-K., Liu, T. Y. & Chang, W. T., 2010 Nov 29, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 340-343 4 p. 5592234. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aluminum
Oxides
Electric potential
Aluminum foil
Temperature

Evolution of mechanical property of nanocomposite TiSiN films using reactive magnetron cosputtering

Chung, C-K., Jhu, J. J., Chang, S. C. & Wu, B. H., 2010 Nov 29, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 344-347 4 p. 5592231. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanocomposite films
Mechanical properties
Sputtering
Nanocomposites
Hardness
1 Citation (Scopus)

Fabrication and simulation of PDMS assisted CO2 laser ablation

Chung, C-K., Lin, S. L., Chang, K. C. & Wang, H. Y., 2010 Nov 29, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 650-653 4 p. 5592489. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser ablation
Polydimethylsiloxane
Ablation
Fabrication
Thermal gradients

Formation and observation of thermal bubble from multilayer heating material

Chung, C. K., Chang, E. C. & Zou, B. H., 2010 Nov 29, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 684-687 4 p. 5592497. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Multilayers
Heating
Acoustic impedance
Heat losses
Polysilicon

Nano-mechanical behavior of low temperature electroplated nano-crystalline Ni films

Chung, C-K. & Chang, W. T., 2010 Nov 29, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 203-206 4 p. 5592186. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Crystalline materials
Electroplating
Deposits
Temperature
Hardness
4 Citations (Scopus)

Simulation and fabrication of Pyrex glass drilling using CO2 laser

Lin, S. L., Wang, H. Y. & Chung, C. K., 2010 Nov 29, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 333-336 4 p. 5592232. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Drilling
Fabrication
Glass
Lasers
Processing
2009

Characteristics of truncate-angle rhombic micromixer and rapid mold fabrication using CO2 laser micromachining

Chung, C-K., Shih, T. R. & Wu, B. R., 2009, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 535-538 4 p. 5068636

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Micromachining
Fabrication
Lasers
Photolithography
Fluid dynamics

Comparison of methods for sensing contact potential difference of nanocrystalline alloy films using a kelvin actuating capacitor

Chung, C-K. & Chang, W. T., 2009 Oct 12, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 274-277 4 p. 5068576. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanocrystalline alloys
Photoelectron spectroscopy
Ultraviolet spectroscopy
Capacitors
Current density
2 Citations (Scopus)

Design of a novel microreactor for microfluidic synthesis of silica nanoparticles

Chung, C-K., Shih, T. R. & Wu, B. H., 2009 Dec 11, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. p. 1341-1344 4 p. 5285849. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microfluidics
Silica
Flow velocity
Nanoparticles
Fluids
1 Citation (Scopus)

Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims

Chung, C. K. & Jhu, J. J., 2009 Oct 12, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 783-786 4 p. 5068695. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanocomposites
Nitrogen
Mechanical properties
Microstructure
Sputtering

Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing

Wu, B. H., Chung, C-K. & Lal, C. W., 2009 Dec 1, 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009. p. 193-196 4 p. 5559089. (2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diamond
Carbon
Temperature
Vacuum
Hot Temperature
2 Citations (Scopus)

Fabrication of a novel micro liquid flow sensor using a Tan thin film

Chung, C-K., Chen, T. C., Shih, T. R. & Chang, W. T., 2009 Oct 12, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 885-888 4 p. 5068716. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fabrication
Thin films
Sensors
Liquids
Negative temperature coefficient

Influence of substrate bias on the resistivity and TCR of nanostructured Ta-Si-N films

Chung, C-K., Chang, Y. L. & Chen, T. S., 2009 Oct 12, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 551-554 4 p. 5068640. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Substrates
Temperature
Rapid thermal annealing
Electric properties
Annealing
1 Citation (Scopus)

Simulation of the novel micro-valve using dynamic analysis

Chung, C. K., Shih, T. R. & Wu, B. R., 2009 Oct 12, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 527-530 4 p. 5068634. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dynamic analysis
Flow rate
Nozzles

Structure variation and annealing effect on mechanical properties of single carbon films

Lail, C. W., Wu, B. H., Hung, S. T. & Chung, C-K., 2009, 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009. p. 197-200 4 p. 5559086

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hardness
Elastic Modulus
Carbon
Hot Temperature
Temperature
2008

Annealing effect on the microstructure and morphology of the nanostructured Ta-Si-N thin films

Chung, C. K., Chen, T. S., Peng, C. C. & Wu, B. H., 2008 Sep 1, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 982-985 4 p. 4484486. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Annealing
Thin films
Microstructure
Rapid thermal annealing
Thermodynamic stability
1 Citation (Scopus)

Design of a self-stirring micromixer at low reynolds number flow

Shih, T. R., Chung, C-K. & Wang, C. H., 2008 Sep 1, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 65-68 4 p. 4484287. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Reynolds number
Taguchi methods
Pressure drop
Fabrication
Computational fluid dynamics
2 Citations (Scopus)

Mixing process of an obstacles micromixer with low pressure drop

Chung, C-K., Shih, T. R., Chen, Y. S. & Wang, C. H., 2008 Sep 1, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 170-172 3 p. 4484311. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pressure drop
Microchannels
Computational fluid dynamics
Vortex flow
Reynolds number
3 Citations (Scopus)

Rapid thermal annealing enhanced crystalline SiC particles at lower formation temperature

Wu, B. H., Chung, C-K. & Peng, C. C., 2008 Sep 1, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 1181-1184 4 p. 4484528. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rapid thermal annealing
Annealing
Crystalline materials
Furnaces
Nanoparticles
1 Citation (Scopus)

Reaction of carbon and silicon at high temperature deposition

Chung, C-K. & Wu, B. H., 2008 Sep 1, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 136-139 4 p. 4484304. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silicon carbide
Silicon
Carbon
Crystalline materials
Temperature

Sensing and determination of contact potential difference between two metals using an actuating capacitor

Chung, C. K. & Chang, W. T., 2008 Sep 1, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 215-218 4 p. 4484321. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Capacitors
Dissimilar metals
Materials science
Metals
Costs
2007
1 Citation (Scopus)

Design and simulation of a rhombic micromixer for rapid mixing

Chung, C-K., Shin, T. R., Tseng, T. C., Chen, T. C. & Wu, B. H., 2007 Aug 28, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. p. 664-667 4 p. 4160409. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microchannels
Protein folding
Fluids
Drug delivery
Computational fluid dynamics

Effect of amorphous Si thickness on the formation of SiC nanoparticles during high vacuum annealing

Chung, C-K., Wu, B. H., Chen, T. S., Peng, C. C. & Shih, T. R., 2007 Aug 28, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. p. 426-429 4 p. 4160354. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Vacuum
Annealing
Nanoparticles
Temperature
Activation energy
2 Citations (Scopus)

Etching behavior of silicon using CO2 laser

Chung, C-K., Wu, M. Y., Hsiao, E. J. & Sung, Y. C., 2007 Aug 28, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. p. 59-62 4 p. 4160432. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Etching
Silicon
Lasers
Micromachining
Glass
1 Citation (Scopus)

Fabrication and characterization of nanostructured Ta-Si-N films

Chung, C. K., Chen, T. S., Peng, C. C. & Wu, B. H., 2007 Aug 28, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. p. 308-311 4 p. 4160326. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fabrication
Nanohardness
Microstructure
Electric conductivity
Sputtering
1 Citation (Scopus)

Fabrication of light guide plate using backside exposure lithography

Chung, C-K., Sher, K. L., Hsiao, E. J., Wu, M. Y. & Hong, Z. B., 2007 Dec 1, IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings. p. 417-419 3 p. (IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lithography
Fabrication
Cones
Microstructure
Polymethyl Methacrylate
2006
5 Citations (Scopus)

Design and simulation of a novel micro-mixer with baffles and side-wall injection into the main channel

Chung, C-K., Wu, C-Y., Shih, T. R., Wu, C. F. & Wu, B. H., 2006 Jan 1, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. IEEE Computer Society, p. 721-724 4 p. 4135054. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pressure
Injections
Microfabrication
Contacts (fluid mechanics)
Pressure drop

Growth of SiC nanoparticles in C/Si multilayers using annealing

Chung, C. K., Wu, B. H. & Shih, T. R., 2006 Jan 1, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. IEEE Computer Society, p. 915-918 4 p. 4135097. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Vacuum
Nanoparticles
Multilayers
Hot Temperature
Annealing
8 Citations (Scopus)

Silicon micromachining by CO2 laser

Chung, C. K., Wu, M. Y., Wu, J. C., Sung, Y. C. & Huang, G. R., 2006 Dec 1, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. p. 1445-1448 4 p. 4135215. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microtechnology
Gas Lasers
Micromachining
Silicon
Lasers
2005
10 Citations (Scopus)

A novel fabrication of Ionic Polymer-Metal Composites (IPMC) actuator with silver nano-powders

Chung, C. K., Hong, Y. Z., Fung, P. K., Ju, M. S., Lin, C. C. K. & Wu, T. C., 2005 Nov 9, TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. p. 217-220 4 p. 1D5.4. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silver
Actuators
Powders
Fabrication
Composite materials
1 Citation (Scopus)

Modification of heater and bubble clamping behavior in off-shooting inkjet ejector

Fang, Y. J., Lee, J. I., Wang, C. H., Chung, C-K. & Ting, J., 2005 Dec 1, Proceedings of the Fourth IEEE Conference on Sensors 2005. p. 97-100 4 p. 1597645. (Proceedings of IEEE Sensors; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Explosive well stimulation
Bubble formation
Trajectories
Electrodes
2004
3 Citations (Scopus)

Inverse RIE lag of silicon deep etching

Chung, C. K. & Chiang, H. N., 2004 Nov 2, 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004. Laudon, M. & Romanowicz, B. (eds.). p. 481-484 4 p. (2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Reactive ion etching
Etching
Silicon
Coalescence
Gases

Novel monolithic micro droplet generator

Chung, C-K., Lin, C. J., Chen, C. C., Chuang, S. W., Fang, Y. J. & Hong, Y. Z., 2004 Nov 2, 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004. Laudon, M. & Romanowicz, B. (eds.). p. 367-370 4 p. (2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gas generators
Polymers
Electroforming
Bubble formation
Photoresists
2003

An actuator for controlling the area of dielectric layer of the tunable capacitor by commercial CMOS fabrication

Chiou, J. H., Lin, R. J., Dai, C. L., Yen, K. H., Shih, Y. C. & Chung, C-K., 2003 Jan 1, Micro-Electro-Mechanical Systems (MEMS) - 2003. American Society of Mechanical Engineers, p. 623-627 5 p. (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); vol. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cantilever beams
Capacitors
Actuators
Fabrication
Metals
2002
4 Citations (Scopus)

The introduction of MEMS packaging technology

Hsieh, C. T., Ting, J-M., Yang, C. & Chung, C-K., 2002 Jan 1, Proceedings of the 4th International Symposium on Electronic Materials and Packaging, EMAP 2002. Institute of Electrical and Electronics Engineers Inc., p. 300-306 7 p. 1188855. (Proceedings of the 4th International Symposium on Electronic Materials and Packaging, EMAP 2002).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

MEMS
Packaging
Biochemistry
Consumer electronics
Modems
1994
1 Citation (Scopus)

Thermal stability of Ir-silicide/SiGe layers grown in a dual electron gun chamber at ultra-high vacuum (extended abstract)

Chung, C-K. & Hwang, J., 1994 Jan 1, Infrared Detectors - Materials, Processing, and Devices. Dawson, R. L. & Appelbaum, A. (eds.). Publ by Materials Research Society, p. 319-323 5 p. (Materials Research Society Symposium Proceedings; vol. 299).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electron guns
electron guns
Ultrahigh vacuum
ultrahigh vacuum
Thermodynamic stability