Chen-Kuei Chung

Professor

  • 1722 Citations
  • 21 h-Index
1992 …2020
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Research Output 1992 2020

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Conference article
1998

Novel approach to corner compensation of multistep Si(100) terraced structure for microlens

Chung, C-K., Lee, C. C. & Wu, C. Y., 1998 Jan 1, In : LEOS Summer Topical Meeting. p. 91-92 2 p.

Research output: Contribution to journalConference article

Etching
etching
Anisotropic etching
Photomasks
buffers