Chen-Kuei Chung

Professor

  • 1722 Citations
  • 21 h-Index
1992 …2020
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Research Output 1992 2020

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Review article
2015
3 Citations (Scopus)

Synthesis and characteristics of nanostructured silicon-rich nitride thin films using modified long-wavelength CO2 laser annealing

Chung, C-K., Li, C. H. & Chen, T. S., 2015 Sep 1, In : Laser Physics Letters. 12, 9, 096003.

Research output: Contribution to journalReview article

laser annealing
silicon nitrides
Nitrides
Annealing
Thin films