Projects per year
Personal profile
Education
- 2009 Ph.D., Institute of Applied Mechanics, National Taiwan University
- 2004 B.S., Mechanical Engineering, National Taiwan University
Experience
- 2020/02~ Assistant Professor, Department of Mechanical Engineering, National Cheng Kung University, Taiwan.
- 2018/09~2020/02 Technical Lead, Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company.
- 2013/09~2018/09 Principle Engineer, Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company.
- 2011/09~2012/04 Visiting scholar, Functional Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands.
- 2009/09~2013/09 Researcher, Material and Chemical Research Laboratories, Industrial Technology Research Institute.
Research Interests
- 奈米光學 (Nano-Optics)
- 微奈米製造技術 (Micro/Nano Fabrication Technology)
- 光學機構系統 (Opto-Mechanical Systems)
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Collaborations and top research areas from the last five years
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Projects
- 2 Finished
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Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction
Chang, C. K. & Chien, H. Y., 2024 Jul, In: Optics and Laser Technology. 174, 110653.Research output: Contribution to journal › Article › peer-review
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Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network
Chang, C. K. & Yang, C. W., 2024 Feb 26, In: Optics Express. 32, 5, p. 8389-8396 8 p.Research output: Contribution to journal › Article › peer-review
Open Access -
Enhancement of photothermal effect using a hierarchical plasmonic structure
Chang, C. K. & Huang, T. H., 2023 Nov 30, In: Applied Surface Science. 638, 158034.Research output: Contribution to journal › Article › peer-review
2 Citations (Scopus) -
Polarization-switchable focal vortex beam by an Archimedean array
Chang, C. K. & Wei, C. H., 2023 Mar 13, In: Optics Express. 31, 6, p. 9915-9922 8 p.Research output: Contribution to journal › Article › peer-review
Open Access1 Citation (Scopus) -
Wavefront engineering based on hybrid plasmonic mode
Chang, C. K. & Yeh, W. T., 2023 Aug, In: Optics and Lasers in Engineering. 167, 107605.Research output: Contribution to journal › Article › peer-review