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Research Output 1997 2019

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Conference contribution
2011
1 Citation (Scopus)

Electrical properties of a single p-type ZnO nanowire by Ga implantation with FIB

Chu, W. H. & Liu, C-P., 2011 Sep 26, 4th IEEE International NanoElectronics Conference, INEC 2011. 5991791. (Proceedings - International NanoElectronics Conference, INEC).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanowires
Electric properties
Ohmic contacts
Focused ion beams
Electric potential
3 Citations (Scopus)

Low-stress transfer of graphene and its tuneable resistance by remote plasma treatments in hydrogen

Chen, W., Tu, C. H., Liang, K. C., Liu, C. Y., Liu, C. P. & Tzeng, Y., 2011 Dec 1, 2011 11th IEEE International Conference on Nanotechnology, NANO 2011. p. 1093-1096 4 p. 6144398. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Graphite
Graphene
Hydrogen
graphene
Plasmas
2009

A novel flash-ion-sensitive field-effect transistor (FISFET) with HfO 2/Gd2O3(Gd) nano-crystal/SiO2 sensing membranes under super nernstian phenomenon for ph and urea detection

Lu, T. F., Wang, J. C., Lai, C. S., Yang, C. M., Wu, M. H., Liu, C-P., Huang, R. S. & Fang, Y. C., 2009 Dec 1, 2009 International Electron Devices Meeting, IEDM 2009 - Technical Digest. 5424289. (Technical Digest - International Electron Devices Meeting, IEDM).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ion sensitive field effect transistors
ureas
Urea
flash
Hydrogen
2 Citations (Scopus)

Fabrication of bismuth nanowire devices using focused ion beam milling

Cheng, H. H., Alkaisi, M. M., Wu, S. E. & Liu, C. P., 2009 Nov 25, Advanced Materials and Nanotechnology - Proceedings of the International Conference (AMN-4). p. 48-51 4 p. (AIP Conference Proceedings; vol. 1151).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

bismuth
nanowires
ion beams
fabrication
electric contacts
2008
1 Citation (Scopus)

Alternating current bias-assisted photoenhanced oxidation of n-GaN in dionized water

Hsueh, T. H., Lai, W. C., Yeh, C. Y., Sheu, J. K., Peng, L. C., Chang, K. H., Wu, S. E., Liu, C. P., Gault, B. & Ringer, S. P., 2008 Dec 1, Proceedings of the 2008 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD'08. p. 1-3 3 p. 4802077. (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bias currents
Oxidation
Water
Aluminum Oxide
Gallium
1 Citation (Scopus)

The investigations of InAs quantum dots overgrown on in 0.1Ga0.9As surfactant layer and 10° off-angle (100) GaAs substrate

Tang, S. F., Hsu, M. Y., Chiang, C. D., Su, C. C., Liu, C. P. & Fang, Y. C., 2008 Mar 31, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. 68001E. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6800).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surfactant
Gallium Arsenide
Quantum Dots
Surface-Active Agents
Semiconductor quantum dots
2007
1 Citation (Scopus)

Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter

Liang, Y. H. & Liu, C. P., 2007 Dec 1, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. p. 158-159 2 p. 4456152. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silicon
2006

A hybrid nano-imprinting lithography based on infrared pulsed laser heating

Lee, Y. C., Chen, C. H. & Liu, C. P., 2006 Dec 1, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. p. 6-10 5 p. 4134891. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser heating
Infrared lasers
Silicon
Pulsed lasers
Heating
1 Citation (Scopus)

Determination of residual resist layer thickness in e-beam lithography based on energy dispersive X-ray spectrometer

Lee, Y. C., Chiu, C. Y., Liu, C. P., Hsiao, F. B. & Chen, C. H., 2006 Dec 1, Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 ed. p. 43-48 6 p. (Materials Science Forum; vol. 505-507, no. PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

X ray spectrometers
Polymethyl Methacrylate
Lithography
lithography
spectrometers

Dopant profiling of metal-oxide semiconductor (MOS) structures with scanning electron microscopy

Hsiao, W. C., Liu, C. P., Yang, C. L., Sun, L. C. & Hung, T., 2006 Jul 20, Interfaces in Electronic Materials - Proceedings of the International Symposium. p. 180-183 4 p. (Proceedings - Electrochemical Society; vol. PV 2003-31).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor doping
Doping (additives)
Scanning electron microscopy
Electric potential
Metals
2005
1 Citation (Scopus)

Modeling of heat transfer for laser-assisted direct nano imprint processing

Hsiao, F. B., Wang, D. B., Jen, C. P., Hsu, H. J., Chuang, C. H., Lee, Y-C. & Liu, C-P., 2005 Dec 1, 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO. p. 747-751 5 p. 1708840. (2005 IEEE International Conference on Robotics and Biomimetics, ROBIO; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Melting
Contact resistance
Heat transfer
Lasers
Processing

Modeling of laser assisted direct imprinting process based on pulsed laser heating and elastodynamic theory

Lee, Y-C., Chuang, C. H., Wang, D. B., Liu, C-P. & Hsiao, F. B., 2005 Dec 1, 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings. Laudon, M. & Romanowicz, B. (eds.). p. 680-683 4 p. (2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser heating
Pulsed lasers
Lasers
Quartz
Materials properties
2003

Effect of Ta2N crystallinity on diffusion barrier properties

Chung, H. C. & Liu, C-P., 2003, Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics II - Proceedings of the International Symposium. Electrochemical Society Inc., Vol. 10. p. 161-166 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diffusion barriers
Silicon
Crystal orientation
Copper
Annealing

Eletrical and mechanical properies of nitrogen and fluorine incorporated organosilicate glass prepared by plasma enhanced chemical vapor deposition

JangJian, S. K., Liu, C-P., Hwang, W. S., Chen, S. W., Wei, K. H. & Wang, Y. L., 2003, Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics II - Proceedings of the International Symposium. Electrochemical Society Inc., Vol. 10. p. 188-194 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fluorine
Plasma enhanced chemical vapor deposition
Nitrogen
Glass
Composite films

Thickness effect on the diffusion barrier properties of ZrN in Cu/ZrN/Si systems

Chen, C. S., Liu, C-P., Yang, H. G. & Tsao, C. Y. A., 2003, Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics II - Proceedings of the International Symposium. Electrochemical Society Inc., Vol. 10. p. 146-153 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diffusion barriers
Annealing
Reactive sputtering
Thick films
Magnetron sputtering