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Research Output 1997 2019

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Conference article
2008
2 Citations (Scopus)

Non-lithographic nanopatterning of InGaN/GaN multiple quantum well nanopillars by focused ion beams

Wu, S. E., Hsueh, T. H., Liu, C-P., Sheu, J-K., Lai, W-C. & Chang, S-J., 2008 Dec 1, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 6, p. 2186-2188 3 p.

Research output: Contribution to journalConference article

ion beams
quantum wells
cathodoluminescence
fabrication
light emitting diodes
2006
3 Citations (Scopus)

Characterization and thermal stability of fluorosilicate glass films deposited by high density plasma chemical vapor deposition with different bias power

Hsiao, W. C., Liu, C-P., Wang, Y. L. & Cheng, Y. L., 2006 Mar 1, In : Thin Solid Films. 498, 1-2, p. 289-293 5 p.

Research output: Contribution to journalConference article

fluorosilicates
Plasma density
plasma density
Chemical vapor deposition
Thermodynamic stability
1 Citation (Scopus)

Characterization of sputter-induced temperature effect in fluorine doped SiO2 film deposition by high-density plasma chemical vapor deposition

Hsiao, W. C., Liu, C-P. & Wang, Y. L., 2006 Mar 1, In : Thin Solid Films. 498, 1-2, p. 20-24 5 p.

Research output: Contribution to journalConference article

fluorosilicates
Helium
Fluorine
Plasma density
cooling systems
31 Citations (Scopus)

High-selectivity damascene chemical mechanical polishing

Chiu, S. Y., Wang, Y. L., Liu, C-P., Chang, S. C., Hwang, G. J., Feng, M. S. & Chen, C. F., 2006 Mar 1, In : Thin Solid Films. 498, 1-2, p. 60-63 4 p.

Research output: Contribution to journalConference article

Chemical mechanical polishing
polishing
Copper
selectivity
copper
20 Citations (Scopus)

Novel slurry solution for dishing elimination in copper process beyond 0.1-μm technology

Chen, K. W., Wang, Y. L., Liu, C-P., Chang, L. & Li, F. Y., 2006 Mar 1, In : Thin Solid Films. 498, 1-2, p. 50-55 6 p.

Research output: Contribution to journalConference article

Copper
elimination
copper
Cytidine Monophosphate
Polishing
20 Citations (Scopus)

The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films

Huang, J. H. & Liu, C-P., 2006 Mar 1, In : Thin Solid Films. 498, 1-2, p. 152-157 6 p.

Research output: Contribution to journalConference article

Zinc Oxide
Zinc oxide
zinc oxides
Magnesium
Oxide films
17 Citations (Scopus)

Tuning the emitting wavelength of InGaN/GaN superlattices from blue, green to yellow by controlling the size of InGaN quasi-quantum dot

Lai, Y. L., Liu, C-P. & Chen, Z. Q., 2006 Mar 1, In : Thin Solid Films. 498, 1-2, p. 128-132 5 p.

Research output: Contribution to journalConference article

Superlattices
Semiconductor quantum wells
Semiconductor quantum dots
superlattices
polarity
3 Citations (Scopus)

Uniform CoSi2 nano-nucleus formation by oxide mediated silicidation with a Ti capping layer

Chang, J. J., Hsieh, T. E., Liu, C-P. & Wang, Y. L., 2006 Mar 1, In : Thin Solid Films. 498, 1-2, p. 85-89 5 p.

Research output: Contribution to journalConference article

Oxides
Annealing
nuclei
oxides
annealing
2004
6 Citations (Scopus)

Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect

Chen, K. W., Wang, Y. L., Liu, C-P., Yang, K., Chang, L., Lo, K-Y. & Liu, C. W., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 531-536 6 p.

Research output: Contribution to journalConference article

Cytidine Monophosphate
Chemical mechanical polishing
Polishing
Copper
platforms
14 Citations (Scopus)

Fluorine-modified low-k a-SiOC:H composite films prepared by plasma enhanced chemical vapor deposition

JangJean, S. K., Liu, C-P., Wang, Y. L., Hwang, W. S., Tseng, W. T., Chen, S. W. & Lo, K-Y., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 674-680 7 p.

Research output: Contribution to journalConference article

Fluorine
Composite films
Plasma enhanced chemical vapor deposition
fluorine
vapor deposition
15 Citations (Scopus)

Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant material

Cheng, Y. L., Wang, Y. L., Wu, Y. L., Liu, C-P., Liu, C. W., Lan, J. K., O'Neil, M. L., Ay, C. & Feng, M. S., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 681-687 7 p.

Research output: Contribution to journalConference article

moisture resistance
Siloxanes
Fluorine
siloxanes
fluorine
1 Citation (Scopus)

Monitor and eliminate the circular defects in HDP-STI deposition through oxynitride/oxide composite liner

Lan, J. K., Wang, Y. L., Liu, C-P., Lee, W-S., Ay, C., Cheng, Y. L. & Chang, S. C., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 645-650 6 p.

Research output: Contribution to journalConference article

Plasma density
oxynitrides
linings
Oxides
plasma density
9 Citations (Scopus)

Study on precipitations of fluorine-doped silicon oxide

Wu, J., Wang, Y. L., Liu, C-P., Chang, S. C., Kuo, C. T. & Ay, C., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 599-604 6 p.

Research output: Contribution to journalConference article

Fluorine
Silicon oxides
silicon oxides
Oxide films
fluorine
2003

Characterization of Co-catalyzed multiwalled carbon nanotubes by high-resolution transmission electron microscopy

Wang, C. C., Liu, C-P., Liu, R. M. & Liao, K. H., 2003 Jul 25, In : Materials Research Society Symposium - Proceedings. 737, p. 703-708 6 p.

Research output: Contribution to journalConference article

Multiwalled carbon nanotubes (MWCN)
High resolution transmission electron microscopy
Cobalt
carbon nanotubes
cobalt
4 Citations (Scopus)

Quantitative characterization of self-assembled coherent islands

Liu, C-P. & Gibson, J. M., 2003 Jan 22, In : Thin Solid Films. 424, 1, p. 2-8 7 p.

Research output: Contribution to journalConference article

Diffraction
Strain relaxation
Heterojunctions
Aspect ratio
Semiconductor materials

The microstructure of Co nanoparticles directly deposited on Si (001) substrates using DC magnetron sputtering

Chung, B. X., Liu, C-P. & Chen, J. N., 2003 Jul 25, In : Materials Research Society Symposium - Proceedings. 737, p. 727-731 5 p.

Research output: Contribution to journalConference article

Magnetron sputtering
magnetron sputtering
direct current
Nanoparticles
nanoparticles
6 Citations (Scopus)

The relationship between nano-scale Sm211/Sm123 interfaces and superconductivity of Sm-Ba-Cu-O materials

Chen, S. Y., Chen, I-G., Liu, C-P., Hsieh, P. C. & Wu, M. K., 2003 Jul 1, In : IEEE Transactions on Applied Superconductivity. 13, 2, p. 3180-3183 4 p.

Research output: Contribution to journalConference article

Superconductivity
Superconducting materials
superconductivity
Particle size
curvature
2002
2 Citations (Scopus)

The texture and electrical properties of Zr and ZrNx thin films deposited by DC sputtering

Liu, C-P. & Yang, H. G., 2002 Jan 1, In : Materials Research Society Symposium - Proceedings. 721, p. 117-122 6 p.

Research output: Contribution to journalConference article

Sputtering
Electric properties
textures
Textures
sputtering
2001
2 Citations (Scopus)

Evolution of coherent InAs quantum dots above the coherent critical thickness window by metalorganic chemical vapor deposition

Yeoh, T. S., Liu, C. P., Kim, Y. W. & Coleman, J. J., 2001 Dec 1, In : Materials Research Society Symposium - Proceedings. 672, p. O8.7.1-O8.7.5

Research output: Contribution to journalConference article

Metallorganic chemical vapor deposition
Semiconductor quantum dots
metalorganic chemical vapor deposition
interruption
quantum dots
2000

Identification of shape transitions in coherent Ge/Si islands using transmission electron microscopy

Liu, C-P., Henstrom, W. L., Cahill, D. G. & Murray Gibson, J., 2000 Dec 11, In : Materials Research Society Symposium - Proceedings. 583, p. 137-142 6 p.

Research output: Contribution to journalConference article

Domes
Transmission electron microscopy
Strain relaxation
transmission electron microscopy
domes

Shape reversal of Ge/Si domes to pyramids via Si-Ge intermixing and strain reduction

Henstrom, W. L., Chuan-Pu, L. I. U. & Murray Gibson, J., 2000 Dec 11, In : Materials Research Society Symposium - Proceedings. 583, p. 45-50 6 p.

Research output: Contribution to journalConference article

Domes
domes
pyramids
gradients
3 Citations (Scopus)

Study on crystal defects in epitaxial GaN film by high-order weak-beam electron microscopy

Wang, S. Q., Liu, C-P. & Ye, H. Q., 2000 Jan 1, In : Materials Characterization. 44, 4, p. 385-389 5 p.

Research output: Contribution to journalConference article

Edge dislocations
Crystal defects
Epitaxial films
edge dislocations
Dislocations (crystals)
1999
1 Citation (Scopus)

InAs quantum dot growth by APMOCVD

Yeoh, T. S., Swint, R. B., Coleman, J. J. & Liu, C. P., 1999 Jan 1, In : LEOS Summer Topical Meeting. p. 31-32 2 p.

Research output: Contribution to journalConference article

Semiconductor quantum dots
Activation energy
quantum dots
activation energy