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Research Output 1992 2019

  • 427 Citations
  • 13 h-Index
  • 36 Article
  • 11 Conference contribution
  • 7 Patent
  • 1 Conference article
2019

Organic light-emitting diodes with an electro-deposited copper(I) thiocyanate (CuSCN) hole-injection layer based on aqueous electrolyte

Tsai, C. T., Gottam, S. R., Kao, P. C., Perng, D. C. & Chu, S. Y., 2019 Oct, In : Synthetic Metals. 256, 116156.

Research output: Contribution to journalArticle

Organic light emitting diodes (OLED)
Electrolytes
Copper
light emitting diodes
electrolytes
2018
4 Citations (Scopus)

Electrodeposited CuSCN metal-semiconductor-metal high performance deep-ultraviolet photodetector

Lin, H. P., Lin, X. J. & Perng, D. C., 2018 Jan 8, In : Applied Physics Letters. 112, 2, 021107.

Research output: Contribution to journalArticle

photometers
absorbers
metals
rejection
quantum efficiency

Visible-blind ultraviolet photodetectors based on NiO/ZnO NRs with poly-(N-vinylcarbazole) intermediate layer

Huang, D. W., Lin, H. P. & Perng, D. C., 2018 Jan 1, TechConnect Briefs 2018 - Informatics, Electronics and Microsystems. Laudon, M., Case, F., Romanowicz, B. & Case, F. (eds.). TechConnect, p. 213-216 4 p. (TechConnect Briefs 2018 - Advanced Materials; vol. 4).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photodetectors
Nanorods
Thin films
Dark currents
Buffer layers
2017

Effects on selective epitaxial growth of strained-SiGe p-MOSFETs on various (001) Si recess structures

Hong, M. H. & Perng, D. C., 2017 Dec 1, In : Journal of Theoretical and Applied Physics. 11, 4, p. 313-317 5 p.

Research output: Contribution to journalArticle

recesses
field effect transistors
flat surfaces
low resistance
high resistance
22 Citations (Scopus)

Enhancement of short-circuit current density in Cu2O/ZnO heterojunction solar cells

Perng, D. C., Hong, M. H., Chen, K. H. & Chen, K. H., 2017 Jan 1, In : Journal of Alloys and Compounds. 695, p. 549-554 6 p.

Research output: Contribution to journalArticle

Short circuit currents
Heterojunctions
Solar cells
Current density
Nanorods
2015
13 Citations (Scopus)
nanorods
photometers
luminous intensity
buffers
dark current
9 Citations (Scopus)

Non-vacuum growth of graphene films using solid carbon source

Nguyen, B. S., Lin, J. F. & Perng, D. C., 2015 Jun 1, In : Applied Physics Letters. 106, 22, 221604.

Research output: Contribution to journalArticle

graphene
carbon
annealing
air
furnaces
2014
38 Citations (Scopus)

1-nm-thick graphene tri-layer as the ultimate copper diffusion barrier

Nguyen, B. S., Lin, J. F. & Perng, D. C., 2014 Jan 1, In : Applied Physics Letters. 104, 8, 82105.

Research output: Contribution to journalArticle

graphene
copper
nanostructure (characteristics)
diffraction patterns
Raman spectra
3 Citations (Scopus)

Formation of wide band-gap CuInAlS2 thin film and its application to UV Detectors

Perng, D. C., Kao, T. T. & Chang, R. P., 2014 Dec 1, In : Thin Solid Films. 572, p. 28-32 5 p.

Research output: Contribution to journalArticle

ultraviolet detectors
Ultraviolet detectors
Photodetectors
photometers
Energy gap
7 Citations (Scopus)
Graphite
Bending tests
Graphene
Electric properties
Mechanical properties
2013
8 Citations (Scopus)

Cu2O growth characteristics on an array of ZnO nanorods for the nano-structured solar cells

Perng, D. C., Chen, J. W., Kao, T. T. & Chang, R. P., 2013 Sep 25, In : Surface and Coatings Technology. 231, p. 261-266 6 p.

Research output: Contribution to journalArticle

Nanorods
nanorods
Solar cells
solar cells
plating
5 Citations (Scopus)

Nano-structured Cu(In,Al)Se2 near-infrared photodetectors

Chang, R. P. & Perng, D-C., 2013 Feb 1, In : Thin Solid Films. 529, p. 238-241 4 p.

Research output: Contribution to journalArticle

Photodetectors
Nanowires
photometers
nanowires
Infrared radiation
2012
4 Citations (Scopus)

Electrochemical studies of W corrosion for low resistive contact in the 28 nm technology node

Hsu, C. L., Perng, D. C., Chen, Y. M., Huang, S. M., Li, Y. T., Kung, C. H., Lin, C. H., Yang, Y. R., Lin, C. F., Huang, C. & Wu, J. Y., 2012 Jan 6, In : Journal of the Electrochemical Society. 159, 2, p. H162-H165

Research output: Contribution to journalArticle

corrosion
Corrosion
Tungsten
Chemical mechanical polishing
Potentiodynamic polarization
2 Citations (Scopus)

Monitoring implant anneal by non-contact room temperature photoluminescence

Hong, M. H., Perng, D-C., Jian, S. K. J. & Yoo, W. S., 2012 Dec 1, In : ECS Solid State Letters. 1, 5

Research output: Contribution to journalArticle

Arc lamps
Photoluminescence
Monitoring
Sheet resistance
Arsenic
2 Citations (Scopus)

Non-contact monitoring of Ge and B diffusion in B-doped epitaxial Si 1-xGex bi-layers on silicon substrates during rapid thermal annealing by multiwavelength Raman spectroscopy

Hong, M. H., Chang, C. W., Perng, D-C., Lee, K. C., Jian, S. K. J., Lee, W. F., Chuang, Y., Fan, Y. T. & Yoo, W. S., 2012 Dec 1, In : AIP Advances. 2, 3, 032150.

Research output: Contribution to journalArticle

Raman spectroscopy
annealing
silicon
thermal diffusion
wafers
2 Citations (Scopus)

Reliability studies of mo layer deposited on polyimide substrate for CIGS solar cell applications

Perng, D-C., Hung, M. C. & Wang, K. Y., 2012, Program - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012. p. 891-894 4 p. 6317745

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polyimides
Solar cells
Substrates
Annealing
Cracks
14 Citations (Scopus)

Robust ultra-thin RuMo alloy film as a seedless Cu diffusion barrier

Hsu, K. C., Perng, D. C. & Wang, Y. C., 2012 Mar 5, In : Journal of Alloys and Compounds. 516, p. 102-106 5 p.

Research output: Contribution to journalArticle

Diffusion barriers
Leakage currents
Diffraction patterns
Annealing
Ultrathin films
1 Citation (Scopus)
Boron
Silicon
Photoluminescence
Sheet resistance
Annealing
15 Citations (Scopus)

Ultrathin Cr added Ru film as a seedless Cu diffusion barrier for advanced Cu interconnects

Hsu, K. C., Perng, D. C., Yeh, J. B. & Wang, Y. C., 2012 Jul 1, In : Applied Surface Science. 258, 18, p. 7225-7230 6 p.

Research output: Contribution to journalArticle

Diffusion barriers
Diffraction patterns
X ray diffraction
Sheet resistance
High resolution transmission electron microscopy
2011
8 Citations (Scopus)

Effects of post-CMP cleaning on time dependent dielectric breakdown and electro-migration in porous low-kCu interconnects

Hsu, C. L., Perng, D-C., Lin, W. C., Lu, K. T., Tsai, T. C., Huang, C. & Wu, J. Y., 2011 Oct 18, In : Journal of the Electrochemical Society. 158, 11

Research output: Contribution to journalArticle

Cytidine Monophosphate
Electromigration
Electric breakdown
Cleaning
Surface roughness
27 Citations (Scopus)

Formation of CuInAlSe2 film with double graded bandgap using Mo(Al) back contact

Perng, D. C., Chen, J. W. & Wu, C. J., 2011 Jan 1, In : Solar Energy Materials and Solar Cells. 95, 1, p. 257-260 4 p.

Research output: Contribution to journalArticle

Energy gap
Adhesion
Electric fields
Doping (additives)
Glass
11 Citations (Scopus)

Mechanism of forming (2 2 0/2 0 4)-oriented CuInSe2 film on Al:ZnO substrate using a two-step selenization process

Fang, J. F., Perng, D-C. & Chen, J. W., 2011 Apr 15, In : Journal of Crystal Growth. 321, 1, p. 106-112 7 p.

Research output: Contribution to journalArticle

Vapor pressure
vapor pressure
Substrates
Selenium
selenium
50 Citations (Scopus)

Nano-structured Cu2O solar cells fabricated on sparse ZnO nanorods

Chen, J. W., Perng, D. C. & Fang, J. F., 2011 Aug 1, In : Solar Energy Materials and Solar Cells. 95, 8, p. 2471-2477 7 p.

Research output: Contribution to journalArticle

Nanorods
Solar cells
Tin oxides
Indium
ITO glass
10 Citations (Scopus)

Nano-structured ZnSe/CIS heterojunction solar cells with ZnSe/ZnO coaxial nanowires

Perng, D-C., Fang, J. F. & Chen, J. W., 2011, In : Journal of the Electrochemical Society. 158, 10

Research output: Contribution to journalArticle

Conversion efficiency
Nanowires
Heterojunctions
heterojunctions
Solar cells
22 Citations (Scopus)

Near-infrared photodetector with CuIn1-x AlxSe 2 thin film

Chang, R. P. & Perng, D. C., 2011 Aug 22, In : Applied Physics Letters. 99, 8, 081103.

Research output: Contribution to journalArticle

photometers
thin films
photocurrents
infrared spectra
cut-off
2010
2 Citations (Scopus)

5 nm amorphous boron and carbon added Ru film as a highly reliable Cu diffusion barrier

Perng, D-C., Yeh, J. B., Hsu, K. C. & Wang, Y. C., 2010 Jun 21, In : Electrochemical and Solid-State Letters. 13, 8

Research output: Contribution to journalArticle

Boron
Diffusion barriers
boron
Carbon
carbon
5 Citations (Scopus)

A 3 nm self-forming InOx diffusion barrier for advanced Cu/porous low-k interconnects

Perng, D. C., Hsu, K. C. & Yeh, J. B., 2010 May 1, In : Japanese journal of applied physics. 49, 5 PART 3, p. 05FA041-05FA044

Research output: Contribution to journalArticle

Diffusion barriers
X ray photoelectron spectroscopy
photoelectron spectroscopy
Annealing
annealing
8 Citations (Scopus)

Amorphous RuW film as a diffusion barrier for advanced Cu metallization

Yeh, J. B., Perng, D-C. & Hsu, K. C., 2010 Jul 23, In : Journal of the Electrochemical Society. 157, 8

Research output: Contribution to journalArticle

Diffusion barriers
Amorphous films
Metallizing
Copper
diffraction

Influences of the substrate structure on the growth of CuInSe2 and In2Se3thin films

Perng, D-C., Tsai, M. S., Wu, P. Y. & Fang, J. F., 2010 Dec 20, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 2474-2477 4 p. 5614748. (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Substrates
X ray diffraction
Texturing
Surface morphology
Textures
18 Citations (Scopus)

Self-forming AlOx layer as Cu diffusion barrier on porous low-k film

Perng, D. C., Yeh, J. B., Hsu, K. C. & Tsai, S. W., 2010 Jan 1, In : Thin Solid Films. 518, 6, p. 1648-1652 5 p.

Research output: Contribution to journalArticle

Diffusion barriers
Copper
Annealing
copper
annealing
26 Citations (Scopus)

Thermal and Electrical Properties of PVD Ru(P) Film as Cu Diffusion Barrier

Perng, D-C., Hsu, K. C., Tsai, S. W. & Yeh, J. B., 2010 Mar 1, In : Microelectronic Engineering. 87, 3, p. 365-369 5 p.

Research output: Contribution to journalArticle

Diffusion barriers
Physical vapor deposition
Electric properties
Thermodynamic properties
thermodynamic properties
5 Citations (Scopus)

The TDDB failure mode and its engineering study for 45NM and beyond in porous low k dielectrics direct polish scheme

Hsu, C. L., Lu, K. T., Lin, W. C., Lin, J. C., Chen, C. H., Tsai, T. C., Huang, C., Wu, J. Y. & Perng, D. C., 2010 Oct 20, 2010 IEEE International Reliability Physics Symposium, IRPS 2010. p. 918-921 4 p. 5488707. (IEEE International Reliability Physics Symposium Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Failure modes
Fused silica
Capacitance
Fabrication
Geometry
2 Citations (Scopus)

The TDDB study of post-CMP cleaning effect for L40 direct polished porous low K dielectrics Cu interconnect

Hsu, C. L., Lin, W. C., Hsu, C. W., Lin, J. C., Tsai, T. C., Huang, C. C., Wu, J. Y. & Perng, D. C., 2010 Dec 1, Chemical Mechanical Polishing 11. 10 ed. p. 99-105 7 p. (ECS Transactions; vol. 33, no. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Surface roughness
Metals
2009

Copper diffusion barrier properties of a 10 nm W-Mo alloy films on porous SiOC:H

Hsu, K. C., Perng, D. C., Yeh, J. B., Chang, R. P., Fang, J. F. & Huang, C., 2009 Oct 19, Advanced Metallization Conference 2008, AMC 2008. p. 313-317 5 p. (Advanced Metallization Conference (AMC)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diffusion barriers
Copper
Transmission electron microscopy
Energy dispersive spectroscopy
Thermodynamic properties
3 Citations (Scopus)

Defect study of manufacturing feasible porous low k dielectrics direct polish for 45nm technology and beyond

Hsu, C. L., Fang, J. Y., Yu, A., Lin, J., Huang, C., Wu, J. Y. & Perng, D. C., 2009 Oct 1, Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009. p. 140-142 3 p. 5090365. (Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Industrial Oils
Surface roughness
Defects
Metals
Peeling
2 Citations (Scopus)

Ru/WCoCN as a seedless Cu barrier system for advanced Cu metallization

Perng, D. C., Yeh, J. B. & Hsu, K. C., 2009 Nov 15, In : Applied Surface Science. 256, 3, p. 688-692 5 p.

Research output: Contribution to journalArticle

Sheet resistance
Metallizing
Leakage currents
Diffraction patterns
Spectrometry
2008
30 Citations (Scopus)

Phosphorous doped Ru film for advanced Cu diffusion barriers

Perng, D. C., Yeh, J. B. & Hsu, K. C., 2008 Jul 30, In : Applied Surface Science. 254, 19, p. 6059-6062 4 p.

Research output: Contribution to journalArticle

Diffusion barriers
Copper
Glass
Ruthenium
Thermodynamic stability
1 Citation (Scopus)

Single mask dual damascene processes

Perng, D-C., Fang, J. F. & Chen, J. W., 2008 Mar 1, In : Microelectronic Engineering. 85, 3, p. 599-602 4 p.

Research output: Contribution to journalArticle

Masks
masks
costs
Chromium
Photoresists
2003
3 Citations (Scopus)

Gas cluster ion beam application to porous low-k dielectrics

Hautala, J., Book, G., White, B., Doughty, C., Perng, D-C. & Kokubo, T., 2003 Dec 1, In : Advanced Metallization Conference (AMC). p. 461-467 7 p.

Research output: Contribution to journalConference article

Ion beams
Gases
Diffusion barriers
Photoresists
Chemical vapor deposition
2000

Implementation of a carbon doped low-k material for 0.18 micron technology

Hsia, W. J., Catabay, W., Lu, M. & Perng, D. C., 2000 Jan 1, In : IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings. 1, p. 403-406 4 p.

Research output: Contribution to journalArticle

Aluminum
Capacitance
Carbon
Statistical process control
Copper
1997
2 Citations (Scopus)

Dry etch challenges of 0.25 μm dual damascene structures

Schnabel, R. F., Dobuzinski, D., Wang, F., Perng, D. C., Gambino, J. & Palm, H., 1997 Dec 1, In : Vide: Science, Technique et Applications. 53, 283 SUPPL., p. 102-104 3 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)

Dry etch challenges of 0.25 μm dual damascene structures

Schnabel, R. F., Dobuzinsky, D., Gambino, J., Muller, K. P., Wang, F., Perng, D. C. & Palm, H., 1997 Nov, In : Microelectronic Engineering. 37-38, p. 59-65 7 p.

Research output: Contribution to journalArticle

Antireflection coatings
antireflection coatings
Metals
tapering
metals
1994
5 Citations (Scopus)

Miniature electron microscopes for lithography

Feinerman, A. D., Crewe, D. A., Perng, D. C., Spindt, C. A., Schwoebel, P. R. & Crewe, A. V., 1994 Dec 1, Proceedings of SPIE - The International Society for Optical Engineering. Patterson, D. O. (ed.). Publ by Society of Photo-Optical Instrumentation Engineers, p. 262-273 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 2194).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Elementary particle sources
Electron sources
Electron beam lithography
Charged particles
Lithography
1992
1 Citation (Scopus)

High-throughput electron-beam lithography

Feinerman, A. D., Crewe, D. A., Perng, D-C., Shoaf, S. E. & Crewe, A. V., 1992 Dec 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 78-89 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 1778).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electron Beam Lithography
Electron beam lithography
Wafer
High Throughput
Electron microscopes

Micromachined electron source

Crewe, D. A., Perng, D-C., Shoaf, S. E. & Feinerman, A. D., 1992 Dec 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 66-77 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 1778).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electron sources
electron sources
Scanning Electron Microscope
Electron microscopes
electron microscopes

Micromachined thermionic emitter

Perng, D. C., Crewe, D. A., Lee, S. B. & Feinerman, A. D., 1992 Dec 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 90-98 9 p. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 1778).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

thermionic emitters
Thermal conductivity
filaments
Annealing
Cathode ray tubes
1 Citation (Scopus)

Micromachined thermionic emitters

Perng, D-C., Crewe, D. A. & Feinerman, A. D., 1992 Dec 1, In : Journal of Micromechanics and Microengineering. 2, 1, p. 25-30 6 p., 006.

Research output: Contribution to journalArticle

Tungsten
Melting
Electron microscopes
Wire
Annealing
21 Citations (Scopus)

Sub-centimeter micromachined electron microscope

Crewe, A. V., Feinerman, A. D., Crewe, D. A., Perng, D-C. & Shoaf, S. E., 1992 Jan 1, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 10, 4, p. 611-616 6 p.

Research output: Contribution to journalArticle

Electron microscopes
electron microscopes
Scanning
scanning
grooves
1800

Thin film solar cell and method for manufacturing the same

Perng, D-C., 1800, Patent No. ZL 2011 1 0441126.9

Research output: Patent