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Research Output

  • 441 Citations
  • 13 h-Index
  • 36 Article
  • 11 Conference contribution
  • 7 Patent
  • 1 Conference article
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Article

1-nm-thick graphene tri-layer as the ultimate copper diffusion barrier

Nguyen, B. S., Lin, J. F. & Perng, D. C., 2014 Jan 1, In : Applied Physics Letters. 104, 8, 82105.

Research output: Contribution to journalArticle

41 Citations (Scopus)

5 nm amorphous boron and carbon added Ru film as a highly reliable Cu diffusion barrier

Perng, D-C., Yeh, J. B., Hsu, K. C. & Wang, Y. C., 2010 Jun 21, In : Electrochemical and Solid-State Letters. 13, 8

Research output: Contribution to journalArticle

2 Citations (Scopus)

A 3 nm self-forming InOx diffusion barrier for advanced Cu/porous low-k interconnects

Perng, D. C., Hsu, K. C. & Yeh, J. B., 2010 May 1, In : Japanese journal of applied physics. 49, 5 PART 3, p. 05FA041-05FA044

Research output: Contribution to journalArticle

5 Citations (Scopus)

Amorphous RuW film as a diffusion barrier for advanced Cu metallization

Yeh, J. B., Perng, D-C. & Hsu, K. C., 2010 Jul 23, In : Journal of the Electrochemical Society. 157, 8

Research output: Contribution to journalArticle

8 Citations (Scopus)

Cu2O growth characteristics on an array of ZnO nanorods for the nano-structured solar cells

Perng, D. C., Chen, J. W., Kao, T. T. & Chang, R. P., 2013 Sep 25, In : Surface and Coatings Technology. 231, p. 261-266 6 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)

Dry etch challenges of 0.25 μm dual damascene structures

Schnabel, R. F., Dobuzinsky, D., Gambino, J., Muller, K. P., Wang, F., Perng, D. C. & Palm, H., 1997 Nov, In : Microelectronic Engineering. 37-38, p. 59-65 7 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)

Dry etch challenges of 0.25 μm dual damascene structures

Schnabel, R. F., Dobuzinski, D., Wang, F., Perng, D. C., Gambino, J. & Palm, H., 1997 Dec 1, In : Vide: Science, Technique et Applications. 53, 283 SUPPL., p. 102-104 3 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Effects of post-CMP cleaning on time dependent dielectric breakdown and electro-migration in porous low-kCu interconnects

Hsu, C. L., Perng, D-C., Lin, W. C., Lu, K. T., Tsai, T. C., Huang, C. & Wu, J. Y., 2011 Oct 18, In : Journal of the Electrochemical Society. 158, 11

Research output: Contribution to journalArticle

8 Citations (Scopus)

Effects on selective epitaxial growth of strained-SiGe p-MOSFETs on various (001) Si recess structures

Hong, M. H. & Perng, D. C., 2017 Dec 1, In : Journal of Theoretical and Applied Physics. 11, 4, p. 313-317 5 p.

Research output: Contribution to journalArticle

Electrochemical studies of W corrosion for low resistive contact in the 28 nm technology node

Hsu, C. L., Perng, D. C., Chen, Y. M., Huang, S. M., Li, Y. T., Kung, C. H., Lin, C. H., Yang, Y. R., Lin, C. F., Huang, C. & Wu, J. Y., 2012 Jan 6, In : Journal of the Electrochemical Society. 159, 2, p. H162-H165

Research output: Contribution to journalArticle

4 Citations (Scopus)

Electrodeposited CuSCN metal-semiconductor-metal high performance deep-ultraviolet photodetector

Lin, H. P., Lin, X. J. & Perng, D. C., 2018 Jan 8, In : Applied Physics Letters. 112, 2, 021107.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Enhancement of short-circuit current density in Cu2O/ZnO heterojunction solar cells

Perng, D. C., Hong, M. H., Chen, K. H. & Chen, K. H., 2017 Jan 1, In : Journal of Alloys and Compounds. 695, p. 549-554 6 p.

Research output: Contribution to journalArticle

25 Citations (Scopus)

Formation of CuInAlSe2 film with double graded bandgap using Mo(Al) back contact

Perng, D. C., Chen, J. W. & Wu, C. J., 2011 Jan 1, In : Solar Energy Materials and Solar Cells. 95, 1, p. 257-260 4 p.

Research output: Contribution to journalArticle

27 Citations (Scopus)

Formation of wide band-gap CuInAlS2 thin film and its application to UV Detectors

Perng, D. C., Kao, T. T. & Chang, R. P., 2014 Dec 1, In : Thin Solid Films. 572, p. 28-32 5 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)
13 Citations (Scopus)

Implementation of a carbon doped low-k material for 0.18 micron technology

Hsia, W. J., Catabay, W., Lu, M. & Perng, D. C., 2000 Jan 1, In : IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings. 1, p. 403-406 4 p.

Research output: Contribution to journalArticle

Mechanism of forming (2 2 0/2 0 4)-oriented CuInSe2 film on Al:ZnO substrate using a two-step selenization process

Fang, J. F., Perng, D-C. & Chen, J. W., 2011 Apr 15, In : Journal of Crystal Growth. 321, 1, p. 106-112 7 p.

Research output: Contribution to journalArticle

11 Citations (Scopus)

Micromachined thermionic emitters

Perng, D-C., Crewe, D. A. & Feinerman, A. D., 1992 Dec 1, In : Journal of Micromechanics and Microengineering. 2, 1, p. 25-30 6 p., 006.

Research output: Contribution to journalArticle

1 Citation (Scopus)
8 Citations (Scopus)

Monitoring implant anneal by non-contact room temperature photoluminescence

Hong, M. H., Perng, D-C., Jian, S. K. J. & Yoo, W. S., 2012 Dec 1, In : ECS Solid State Letters. 1, 5

Research output: Contribution to journalArticle

2 Citations (Scopus)

Nano-structured Cu(In,Al)Se2 near-infrared photodetectors

Chang, R. P. & Perng, D-C., 2013 Feb 1, In : Thin Solid Films. 529, p. 238-241 4 p.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Nano-structured Cu2O solar cells fabricated on sparse ZnO nanorods

Chen, J. W., Perng, D. C. & Fang, J. F., 2011 Aug 1, In : Solar Energy Materials and Solar Cells. 95, 8, p. 2471-2477 7 p.

Research output: Contribution to journalArticle

50 Citations (Scopus)

Nano-structured ZnSe/CIS heterojunction solar cells with ZnSe/ZnO coaxial nanowires

Perng, D-C., Fang, J. F. & Chen, J. W., 2011, In : Journal of the Electrochemical Society. 158, 10

Research output: Contribution to journalArticle

10 Citations (Scopus)

Near-infrared photodetector with CuIn1-x AlxSe 2 thin film

Chang, R. P. & Perng, D. C., 2011 Aug 22, In : Applied Physics Letters. 99, 8, 081103.

Research output: Contribution to journalArticle

23 Citations (Scopus)

Non-contact monitoring of Ge and B diffusion in B-doped epitaxial Si 1-xGex bi-layers on silicon substrates during rapid thermal annealing by multiwavelength Raman spectroscopy

Hong, M. H., Chang, C. W., Perng, D. C., Lee, K. C., Jian, S. K. J., Lee, W. F., Chuang, Y., Fan, Y. T. & Yoo, W. S., 2012 Dec 1, In : AIP Advances. 2, 3, 032150.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Non-vacuum growth of graphene films using solid carbon source

Nguyen, B. S., Lin, J. F. & Perng, D. C., 2015 Jun 1, In : Applied Physics Letters. 106, 22, 221604.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Organic light-emitting diodes with an electro-deposited copper(I) thiocyanate (CuSCN) hole-injection layer based on aqueous electrolyte

Tsai, C. T., Gottam, S. R., Kao, P. C., Perng, D. C. & Chu, S. Y., 2019 Oct, In : Synthetic Metals. 256, 116156.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Phosphorous doped Ru film for advanced Cu diffusion barriers

Perng, D. C., Yeh, J. B. & Hsu, K. C., 2008 Jul 30, In : Applied Surface Science. 254, 19, p. 6059-6062 4 p.

Research output: Contribution to journalArticle

30 Citations (Scopus)

Robust ultra-thin RuMo alloy film as a seedless Cu diffusion barrier

Hsu, K. C., Perng, D. C. & Wang, Y. C., 2012 Mar 5, In : Journal of Alloys and Compounds. 516, p. 102-106 5 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)
1 Citation (Scopus)

Ru/WCoCN as a seedless Cu barrier system for advanced Cu metallization

Perng, D. C., Yeh, J. B. & Hsu, K. C., 2009 Nov 15, In : Applied Surface Science. 256, 3, p. 688-692 5 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Self-forming AlOx layer as Cu diffusion barrier on porous low-k film

Perng, D. C., Yeh, J. B., Hsu, K. C. & Tsai, S. W., 2010 Jan 1, In : Thin Solid Films. 518, 6, p. 1648-1652 5 p.

Research output: Contribution to journalArticle

19 Citations (Scopus)

Single mask dual damascene processes

Perng, D-C., Fang, J. F. & Chen, J. W., 2008 Mar 1, In : Microelectronic Engineering. 85, 3, p. 599-602 4 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Sub-centimeter micromachined electron microscope

Crewe, A. V., Feinerman, A. D., Crewe, D. A., Perng, D-C. & Shoaf, S. E., 1992 Jan 1, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 10, 4, p. 611-616 6 p.

Research output: Contribution to journalArticle

21 Citations (Scopus)

Thermal and Electrical Properties of PVD Ru(P) Film as Cu Diffusion Barrier

Perng, D-C., Hsu, K. C., Tsai, S. W. & Yeh, J. B., 2010 Mar 1, In : Microelectronic Engineering. 87, 3, p. 365-369 5 p.

Research output: Contribution to journalArticle

27 Citations (Scopus)

Ultrathin Cr added Ru film as a seedless Cu diffusion barrier for advanced Cu interconnects

Hsu, K. C., Perng, D. C., Yeh, J. B. & Wang, Y. C., 2012 Jul 1, In : Applied Surface Science. 258, 18, p. 7225-7230 6 p.

Research output: Contribution to journalArticle

16 Citations (Scopus)