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Research Output 1992 2019

  • 427 Citations
  • 13 h-Index
  • 36 Article
  • 11 Conference contribution
  • 7 Patent
  • 1 Conference article
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Conference article
2003
3 Citations (Scopus)

Gas cluster ion beam application to porous low-k dielectrics

Hautala, J., Book, G., White, B., Doughty, C., Perng, D-C. & Kokubo, T., 2003 Dec 1, In : Advanced Metallization Conference (AMC). p. 461-467 7 p.

Research output: Contribution to journalConference article

Ion beams
Gases
Diffusion barriers
Photoresists
Chemical vapor deposition