• 2284 Citations
  • 27 h-Index
1983 …2021

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Accuracy and real-time considerations for implementing various virtual metrology algorithms

Su, Y. C., Lin, T. H., Cheng, F. T. & Wu, W. M., 2008 Aug 1, In : IEEE Transactions on Semiconductor Manufacturing. 21, 3, p. 426-434 9 p., 4589025.

Research output: Contribution to journalArticle

43 Citations (Scopus)
3 Citations (Scopus)
6 Citations (Scopus)

Advanced E-manufacturing model: The significance of large-scale, distributed, and object-oriented systems

Cheng, F. T., Tsai, W. H., Wang, T. L., Yung-Cheng Chang, J. & Su, Y. C., 2010 Mar 1, In : IEEE Robotics and Automation Magazine. 17, 1, p. 71-84 14 p., 5430394.

Research output: Contribution to journalArticle

12 Citations (Scopus)

A Gradual Refreshing Scheme for Improving Tool Utilization

Yang, H. C., Tsai, T. H., Tieng, H. & Cheng, F. T., 2019 Apr, In : IEEE Robotics and Automation Letters. 4, 2, p. 515-522 8 p., 8605344.

Research output: Contribution to journalArticle

Analysis and resolution of singularities for a 5-DOF gryphon manipulator

Cheng, F-T., Hour, T. L., Sun, Y. Y. & Kung, F. C., 1995, In : Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. 5, p. 4416-4421 6 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Analysis and resolution of singularities for a 5-DOF GRYPHON manipulator

Cheng, F. T., Hour, T. L., Sun, Y. Y. & Kung, F. C., 1995 Mar 1, In : Journal of Control Systems and Technology. 3, 1, p. 1-13 13 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

An automated dynamic-balancing-inspection scheme for wheel machining

Tieng, H., Li, Y. Y., Tseng, K. P., Yang, H. C. & Cheng, F. T., 2020 Apr, In : IEEE Robotics and Automation Letters. 5, 2, p. 2224-2231 8 p., 8978473.

Research output: Contribution to journalArticle

An efficient data exchange scheme for semiconductor engineering chain management system

Hunga, M. H., Wu, S. W., Wang, T. L., Cheng, F. T. & Feng, Y. Y., 2010 Oct, In : Robotics and Computer-Integrated Manufacturing. 26, 5, p. 507-516 10 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)
4 Citations (Scopus)

An Intelligent Metrology Architecture with AVM for Metal Additive Manufacturing

Yang, H. C., Adnan, M., Huang, C. H., Cheng, F. T., Lo, Y. L. & Hsu, C. H., 2019 Jul, In : IEEE Robotics and Automation Letters. 4, 3, p. 2886-2893 8 p., 8733865.

Research output: Contribution to journalArticle

1 Citation (Scopus)

An object-based controller for equipment communications in semiconductor manufacturing

Cheng, F. T. & Teng, C. Y., 2002 Oct 1, In : Robotics and Computer-Integrated Manufacturing. 18, 5-6, p. 387-402 16 p.

Research output: Contribution to journalArticle

11 Citations (Scopus)

A Novel Automated Construction Scheme for Efficiently Developing Cloud Manufacturing Services

Chen, C. C., Hung, M. H., Li, P. Y., Lin, Y. C., Liu, Y. Y. & Cheng, F. T., 2018 Jul, In : IEEE Robotics and Automation Letters. 3, 3, p. 1378-1385 8 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database

Hung, M. H., Tsai, W. H., Yang, H. C., Kao, Y. J. & Cheng, F. T., 2012 Aug 1, In : Robotics and Computer-Integrated Manufacturing. 28, 4, p. 559-568 10 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

A novel cloud manufacturing framework with auto-scaling capability for the machining industry

Chen, C. C., Lin, Y. C., Hung, M. H., Lin, C. Y., Tsai, Y. J. & Cheng, F. T., 2016 Jul 2, In : International Journal of Computer Integrated Manufacturing. 29, 7, p. 786-804 19 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)

A Novel Efficient Big Data Processing Scheme for Feature Extraction in Electrical Discharge Machining

Chen, C. C., Hung, M. H., Suryajaya, B., Lin, Y. C., Yang, H. C., Huang, H. C. & Cheng, F. T., 2019 Apr, In : IEEE Robotics and Automation Letters. 4, 2, p. 910-917 8 p., 8605347.

Research output: Contribution to journalArticle

A novel ethernet-based equipment integration framework for factory automation

Hung, M. H., Tsai, C. H., Cheng, F. T. & Yang, H. C., 2002 May, In : Proceedings - IEEE International Conference on Robotics and Automation. 1, p. 781-786 6 p.

Research output: Contribution to journalArticle

A novel quantitative measure of redundancy for kinematically redundant manipulators

Hung, M. H., Cheng, F. T. & Ting, J. K., 2001 Jan 1, In : Proceedings - IEEE International Conference on Robotics and Automation. 4, p. 4060-4065 6 p.

Research output: Contribution to journalArticle

A novel virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing

Hung, M. H., Lin, T. H., Cheng, F. T. & Lin, R. C., 2007 Jun 1, In : IEEE/ASME Transactions on Mechatronics. 12, 3, p. 308-316 9 p.

Research output: Contribution to journalArticle

79 Citations (Scopus)

Applying the Automatic Virtual Metrology system to obtain tube-to-tube control in a PECVD tool

Cheng, F. T. & Chiu, Y. C., 2013 Jun 1, In : IIE Transactions (Institute of Industrial Engineers). 45, 6, p. 670-681 12 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)

A processing quality prognostics scheme for plasma sputtering in TFT-LCD manufacturing

Su, Y. C., Hung, M. H., Cheng, F. T. & Chen, Y. T., 2006 May 1, In : IEEE Transactions on Semiconductor Manufacturing. 19, 2, p. 183-193 11 p.

Research output: Contribution to journalArticle

49 Citations (Scopus)

A scheme of high-dimensional key-variable search algorithms for yield improvement

Cheng, F. T., Hsieh, Y. S., Zheng, J. W., Chen, S. M., Xiao, R. X. & Lin, C. Y., 2017 Jan, In : IEEE Robotics and Automation Letters. 2, 1, p. 179-186 8 p., 7498656.

Research output: Contribution to journalArticle

6 Citations (Scopus)
1 Citation (Scopus)

Automated sampling decision scheme for the AVM system

Cheng, F. T., Hsieh, Y. S., Chen, C. F. & Lyu, J. R., 2016 Nov 1, In : International Journal of Production Research. 54, 21, p. 6351-6366 16 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Automatic data quality evaluation for the AVM system

Huang, Y. T. & Cheng, F. T., 2011 Aug 1, In : IEEE Transactions on Semiconductor Manufacturing. 24, 3, p. 445-454 10 p., 5766761.

Research output: Contribution to journalArticle

30 Citations (Scopus)

Automatic Virtual Metrology and Deformation Fusion Scheme for Engine-Case Manufacturing

Tieng, H., Tsai, T. H., Chen, C. F., Yang, H. C., Huang, J. W. & Cheng, F. T., 2018 Apr, In : IEEE Robotics and Automation Letters. 3, 2, p. 934-941 8 p., 8255616.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Automatic Virtual Metrology and Target Value Adjustment for Mass Customization

Tieng, H., Chen, C. F., Cheng, F. T. & Yang, H. C., 2017 Apr, In : IEEE Robotics and Automation Letters. 2, 2, p. 546-553 8 p., 7801027.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Automatic Virtual Metrology for Carbon Fiber Manufacturing

Hsieh, Y. M., Lin, C. Y., Yang, Y. R., Hung, M. H. & Cheng, F. T., 2019 Jul, In : IEEE Robotics and Automation Letters. 4, 3, p. 2730-2737 8 p., 8716511.

Research output: Contribution to journalArticle

Automatic virtual metrology for wheel machining automation

Yang, H. C., Tieng, H. & Cheng, F. T., 2016 Nov 1, In : International Journal of Production Research. 54, 21, p. 6367-6377 11 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)

Benefit model of virtual metrology and integrating AVM into MES

Cheng, F. T., Chang, J. Y. C., Huang, H. C., Kao, C. A., Chen, Y. L. & Peng, J. L., 2011 May 1, In : IEEE Transactions on Semiconductor Manufacturing. 24, 2, p. 261-272 12 p., 5682063.

Research output: Contribution to journalArticle

32 Citations (Scopus)

Blind-Stage Search Algorithm for the Key-Variable Search Scheme

Cheng, F. T., Lin, C. Y., Chen, C. F., Xiao, R. X., Zheng, J. W. & Hsieh, Y. S., 2017 Oct, In : IEEE Robotics and Automation Letters. 2, 4, p. 1840-1847 8 p., 7934071.

Research output: Contribution to journalArticle

1 Citation (Scopus)

CASE 2014 [Society News]

Luo, R. C. & Cheng, F. T., 2015 Jan 1, In : IEEE Robotics and Automation Magazine. 22, 1, p. 130-131 2 p., 7059272.

Research output: Contribution to journalArticle

Control and simulation for a closed‐chain dual redundant ' manipulator system

Cheng, F-T., Lee, JJ. J., Tsing‐hua & Kung, C. FC., 1995 Jan 1, In : Journal of Robotic Systems. 12, 2, p. 119-133 15 p.

Research output: Contribution to journalArticle

14 Citations (Scopus)

Design and implementation of a data exchange platform for TFT-LCD virtual production control systems

Hung, M. H., Lin, Y. C., Li, S. H., Yang, H. C. & Cheng, F. T., 2012, In : International Journal of Automation and Smart Technology. 2, 2, p. 83-94 12 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)
13 Citations (Scopus)

Developing an automatic virtual metrology system

Cheng, F. T., Huang, H. C. & Kao, C. A., 2012 Jan 1, In : IEEE Transactions on Automation Science and Engineering. 9, 1, p. 181-188 8 p., 6051498.

Research output: Contribution to journalArticle

55 Citations (Scopus)

Development of Advanced Manufacturing Cloud of Things (AMCoT)-A Smart Manufacturing Platform

Lin, Y. C., Hung, M. H., Huang, H. C., Chen, C. C., Yang, H. C., Hsieh, Y. S. & Cheng, F. T., 2017 Jul, In : IEEE Robotics and Automation Letters. 2, 3, p. 1809-1816 8 p., 7932169.

Research output: Contribution to journalArticle

35 Citations (Scopus)

Development of an AVM System Implementation Framework

Hung, M. H., Chen, C. F., Huang, H. C., Yang, H. C. & Cheng, F. T., 2012 Nov, In : IEEE Transactions on Semiconductor Manufacturing. 25, 4, p. 598-613 16 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

Hung, M. H., Chen, K. Y., Ho, R. W. & Cheng, F. T., 2003 Jul 1, In : Advanced Engineering Informatics. 17, 3-4, p. 165-178 14 p.

Research output: Contribution to journalArticle

45 Citations (Scopus)
5 Citations (Scopus)

Development of an Ethernet-based equipment integration framework for factory automation

Hung, M. H., Tsai, J., Cheng, F. T. & Yang, H. C., 2004 Oct 1, In : Robotics and Computer-Integrated Manufacturing. 20, 5, p. 369-383 15 p.

Research output: Contribution to journalArticle

21 Citations (Scopus)

Development of an Interface C framework for semiconductor e-Diagnostics systems

Hung, M. H., Wang, T. L., Hsu, F. Y. & Cheng, F. T., 2008 Jun 1, In : Robotics and Computer-Integrated Manufacturing. 24, 3, p. 370-383 14 p.

Research output: Contribution to journalArticle

14 Citations (Scopus)

Development of a novel cloud-based multi-tenant model creation service for automatic virtual metrology

Hung, M. H., Li, Y. Y., Lin, Y. C., Wei, C. F., Yang, H. C. & Cheng, F. T., 2017 Apr 1, In : Robotics and Computer-Integrated Manufacturing. 44, p. 174-189 16 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)

Development of a service management scheme for semiconductor factory management systems

Cheng, F. T., Yang, H. C. & Tsai, C. Y., 2002 Jan 1, In : Proceedings-IEEE International Conference on Robotics and Automation. 4, p. 3607-3612 6 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)
52 Citations (Scopus)

Development of a web-services-based e-diagnostics framework for semiconductor manufacturing industry

Hung, M. H., Cheng, F. T. & Yeh, S. C., 2005 Feb 1, In : IEEE Transactions on Semiconductor Manufacturing. 18, 1, p. 122-135 14 p.

Research output: Contribution to journalArticle

50 Citations (Scopus)

Development of cloud-based automatic virtual metrology system for semiconductor industry

Huang, H. C., Lin, Y. C., Hung, M. H., Tu, C. C. & Cheng, F. T., 2015 Aug, In : Robotics and Computer-Integrated Manufacturing. 34, p. 30-43 14 p.

Research output: Contribution to journalArticle

13 Citations (Scopus)

Development of holonic information coordination systems with failure-recovery considerations

Cheng, F. T., Yang, H. C. & Lin, J. Y., 2004 Jul 1, In : IEEE Transactions on Automation Science and Engineering. 1, 1, p. 58-72 15 p.

Research output: Contribution to journalArticle

27 Citations (Scopus)

Development of holonic manufacturing execution systems

Cheng, F. T., Chang, C. F. & Wu, S. L., 2004 Apr, In : Journal of Intelligent Manufacturing. 15, 2, p. 253-267 15 p.

Research output: Contribution to journalArticle

47 Citations (Scopus)