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Research Output 2001 2019

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Conference contribution
2008

Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, K-S., Green, M. L., Suehle, J., Hattrick-Simpersb, J., Takeuchi, I., Ohmori, K., Chikyow, T., De Gendt, S. & Majhi, P., 2008 Nov 17, ECS Transactions - Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing. 2 ed. p. 151-159 9 p. (ECS Transactions; vol. 13, no. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electrodes
Metals
Chemical analysis
Wavelength dispersive spectroscopy
Scanning
2007

Combinatorial methodologies applied to the advanced CMOS gate stack

Chang, K. S., Bassim, N. D., Schenck, P. K., Suehle, J., Takeuchi, I. & Green, M. L., 2007 Oct 22, CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology. p. 297-302 6 p. (AIP Conference Proceedings; vol. 931).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

CMOS
methodology
experimentation
metals
requirements
2006
1 Citation (Scopus)

Controllability of flatband voltage in high-k gate stack structures - Remarkable advantages of la2O3 over HfO2

Ohmori, K., Ahmet, P., Shiraishi, K., Yamabe, K., Watanabe, H., Akasaka, Y., Umezawa, N., Nakajima, K., Yoshitake, M., Nakayama, T., Chang, K-S., Kakushima, K., Nara, Y., Green, M. L., Iwai, H., Yamada, K. & Chikyow, T., 2006 Jan 1, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society, p. 376-379 4 p. 4098113. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Controllability
Electric potential
Gases
Charge transfer
Annealing

Influences of annealing conditions on flatband voltage properties using continuously workfunction-tuned metal electrodes

Ohmori, K., Ahmet, P., Shiraishi, K., Watanabe, H., Akasaka, Y., Yamabe, K., Yoshitake, M., Chang, K-S., Green, M. L., Yamada, K. & Chikyow, T., 2006 Dec 1, 1st IEEE International Workshop on Nano CMOS, IEEE IWNC 2006. p. 160-162 3 p. 4570988. (2006 International Workshop on Nano CMOS - Proceedings, IWNC).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Annealing
Electrodes
Electric potential
Metals
2003

Exploration of magnetoelectric thin-film sensors using superlattice composition spreads

Chang, K-S., Aronova, M. A., Gao, C., Lin, C. L., Simpers, J. H., Murakami, M. & Takeuchi, I., 2003 Jan 1, 2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 1 p. 1272099. (2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Thin films
Sensors
Chemical analysis
Magnetization
Piezoelectric materials