Kuang-Yao Lo

Professor

  • 698 Citations
  • 14 h-Index
1992 …2020

Research output per year

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Research Output

  • 698 Citations
  • 14 h-Index
  • 76 Article
  • 10 Conference contribution
  • 4 Conference article
  • 2 Paper
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Conference article

Copper surface protection with a completely enclosed copper structure for a damascene process

Wang, T. C., Hsieh, T. E., Wang, Y. L., Wu, Y. L., Lo, K-Y., Liu, C. W. & Chen, K. W., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 542-548 7 p.

Research output: Contribution to journalConference article

Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect

Chen, K. W., Wang, Y. L., Liu, C. P., Yang, K., Chang, L., Lo, K. Y. & Liu, C. W., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 531-536 6 p.

Research output: Contribution to journalConference article

6 Citations (Scopus)

Fluorine-modified low-k a-SiOC:H composite films prepared by plasma enhanced chemical vapor deposition

JangJean, S. K., Liu, C. P., Wang, Y. L., Hwang, W. S., Tseng, W. T., Chen, S. W. & Lo, K. Y., 2004 Jan 30, In : Thin Solid Films. 447-448, p. 674-680 7 p.

Research output: Contribution to journalConference article

14 Citations (Scopus)

Physical and structural properties of RF magnetron sputtered ZnO films

Chang, R. C., Chu, S. V., Lo, K. Y., Lo, S. C. & Huang, Y. R., 2005 Jan 1, In : Integrated Ferroelectrics. 69, p. 43-53 11 p.

Research output: Contribution to journalConference article

9 Citations (Scopus)