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Conference article
2015

A novel junctionless FinFET structure with sub-5nm shell doping profile by molecular monolayer doping and microwave annealing

Lee, Y. J., Cho, T. C., Kao, K-H., Sung, P. J., Hsueh, F. K., Huang, P. C., Wu, C. T., Hsu, S. H., Huang, W. H., Chen, H. C., Li, Y., Current, M. I., Hengstebeck, B., Marino, J., Büyüklimanli, T., Shieh, J. M., Chao, T. S., Wu, W. F. & Yeh, W. K., 2015 Feb 20, In : Technical Digest - International Electron Devices Meeting, IEDM. 2015-February, February, p. 32.7.1-32.7.4 7047158.

Research output: Contribution to journalConference article

19 Citations (Scopus)