Kuo-Shen Chen

Professor

  • 1678 Citations
  • 23 h-Index
19972020

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Review article
2004

Analysis of Experimental Data for Metallic Impurity Out-Diffusion from Deep-UV Photoresist

Yang, T-S., Hsu, N. T., Chen, K-S. & Ko, F. H., 2004 Mar 4, In : Journal of the Electrochemical Society. 151, 2

Research output: Contribution to journalReview article

1 Citation (Scopus)