• 705 Citations
  • 15 h-Index
20012020
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Research Output 2001 2019

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Conference article
2003

A new fabrication of highly dense electromagnetic field microactuators and microoptics for MOEMS applications

Shen, S-C., Pan, C. T., Chou, H. P. & Huang, Y. R., 2003 May 26, In : Proceedings of SPIE - The International Society for Optical Engineering. 4984, p. 128-135 8 p.

Research output: Contribution to journalConference article

MOEMS
Microactuator
Micro-optics
Microoptics
microoptoelectromechanical systems
2001

Electromagnetic optical switch for optical network communication

Pan, C. T., Shen, S. C., Yang, H. H., Chou, M. C. & Wu, S. T., 2001 Dec 1, In : Proceedings of SPIE - The International Society for Optical Engineering. 4582, p. 240-246 7 p.

Research output: Contribution to journalConference article

Optical Switch
Excimer Laser
Wafer bonding
Micromachining
Laser Ablation

Self-parking fiber and self-latching vertical mirror for fiber-optical switch array

Shen, S-C., Pan, C. T. & Chou, H. P., 2001 Jan 1, In : Proceedings of SPIE - The International Society for Optical Engineering. 4407, p. 404-412 9 p.

Research output: Contribution to journalConference article

parking
Optical Switch
Optical switches
Parking
Mirror