• 525 Citations
  • 13 h-Index
1990 …2019
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Research Output 1990 2019

  • 525 Citations
  • 13 h-Index
  • 44 Article
  • 8 Conference contribution
  • 1 Paper
  • 1 Review article
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Review article
2004
1 Citation (Scopus)

Analysis of Experimental Data for Metallic Impurity Out-Diffusion from Deep-UV Photoresist

Yang, T-S., Hsu, N. T., Chen, K-S. & Ko, F. H., 2004 Mar 4, In : Journal of the Electrochemical Society. 151, 2

Research output: Contribution to journalReview article

baking
Photoresists
photoresists
Impurities
impurities