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Research Output 1982 2019

1987

MICROWAVE PLASMA ETCHING OF PHOTORESIST AND POLYIMIDE IN AIR AND OXYGEN.

Tzeng, Y-H., Lin, T. H., Belser, M. A. & Roppel, T. A., 1987, Unknown Host Publication Title. IEEE, p. 155-160 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma etching
Photoresists
Polyimides
Microwaves
Plasmas
27 Citations (Scopus)

Roles of N2O and O2 Gas Additives

Tzeng, Y-H. & Lin, T. H., 1987 Jan 1, In : Journal of the Electrochemical Society. 134, 9, p. 2304-2309 6 p.

Research output: Contribution to journalArticle

Silicon
Gases
silicon
gases
Fluorine

XPS CHARACTERIZATION OF SILICON ETCHED IN SF6 plus N2O AND SF6 plus O2 RF PLASMAS.

Tzeng, Y-H., Lin, T. H., Tatarchuk, B. J., Littrell, D. M. & Sanders, J. H., 1987 Dec 1, In : Proceedings - The Electrochemical Society. 87-6, p. 655-671 17 p.

Research output: Contribution to journalConference article

X ray photoelectron spectroscopy
Silicon
Contamination
Plasmas
Carbon
1986
29 Citations (Scopus)

Effect of energy partition in ionizing collisions on the electron-velocity distribution

Tzeng, Y-H. & Kunhardt, E. E., 1986 Jan 1, In : Physical Review A. 34, 3, p. 2148-2157 10 p.

Research output: Contribution to journalArticle

partitions
velocity distribution
collisions
electrons
energy
37 Citations (Scopus)

Monte Carlo technique for simulating the evolution of an assembly of particles increasing in number

Kunhardt, E. E. & Tzeng, Y-H., 1986 Jan 1, In : Journal of Computational Physics. 67, 2, p. 279-289 11 p.

Research output: Contribution to journalArticle

assembly
error analysis
Error analysis
Monte Carlo method
Monte Carlo methods
6 Citations (Scopus)

Plasma Etching with Tetrafluoromethane and Nitrous Oxide: The Role of Oxygen in the Etching of Silicon Materials

Tzeng, Y-H. & Lin, T. H., 1986 Jan 1, In : Journal of the Electrochemical Society. 133, 7, p. 1443-1448 6 p.

Research output: Contribution to journalArticle

Plasma etching
nitrous oxides
Nitrous Oxide
plasma etching
Silicon
17 Citations (Scopus)

Role of electron-molecule angular scattering in shaping the electron-velocity distribution

Kunhardt, E. E. & Tzeng, Y-H., 1986 Jan 1, In : Physical Review A. 34, 3, p. 2158-2166 9 p.

Research output: Contribution to journalArticle

inelastic collisions
elastic scattering
velocity distribution
scattering cross sections
scattering
34 Citations (Scopus)

Stochastic development of an electron avalanche

Kunhardt, E. E., Tzeng, Y-H. & Boeuf, J. P., 1986 Jan 1, In : Physical Review A. 34, 1, p. 440-449 10 p.

Research output: Contribution to journalArticle

electron avalanche
avalanches
pulse amplitude
Monte Carlo method
energy distribution
1985
2 Citations (Scopus)

ALABAMA MICROELECTRONICS SCIENCE AND TECHNOLOGY CENTER AND THE MICROELECTRONICS PROGRAM AT AUBURN UNIVERSITY.

Jaeger, R. C., Tzeng, Y-H., Daneshvar, K., Baginski, T. A. & Davidson, J. L., 1985, Unknown Host Publication Title. Auburn Univ, p. 42-45 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microelectronics
Hybrid integrated circuits
Monolithic integrated circuits
Industrial research
Fabrication

EFFECTS OF GAS ADDITIVES TO THE SILICON-TO-PHOTORESIST ETCHING SELECTIVITY.

Tzeng, Y-H. & Lin, T. H., 1985, In : Electrochemical Society Extended Abstracts. 85-2, p. 675-676 2 p.

Research output: Contribution to journalArticle

Photoresists
Etching
Silicon
Atoms
Gases

ROLES OF N//2 O IN CF//4 plus N//2 O PLASMA ETCHING OF SILICON AND PHOTORESIST.

Tzeng, Y-H., Lin, T. H., Davidson, J. L. & Jang, B. Z., 1985 Dec 1, p. 28-33. 6 p.

Research output: Contribution to conferencePaper

Plasma etching
Photoresists
Plasmas
Silicon
Etching
1984
8 Citations (Scopus)

KINETIC INVESTIGATION OF AVALANCHE AND STREAMER DEVELOPMENT.

Kunhardt, E. E. & Tzeng, Y-H., 1984, Unknown Host Publication Title. Pergamon Press, p. 146-155 10 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electric fields
Electric space charge
Kinetics
Electrons
Density of gases
1982

The Effect of Space Charge Induced by an Electron Beam on Spark Gap Operation

Tzeng, Y-H., Kunhardt, E. E., Kristiansen, M. & Guenther, A. H., 1982 Jan 1, In : IEEE Transactions on Plasma Science. 10, 4, p. 234-240 7 p.

Research output: Contribution to journalArticle

spark gaps
space charge
electron beams
time lag
gases

Diamond Film Coated Electrode for Battery

Tzeng, Y-H., 1800, Patent No. 9196905

Research output: Patent

Diamond films
Powders
Electrodes
Diamond
Graphite
Graphite
Electromagnetic waves
Optoelectronic devices
Photonics
Detectors

Heating element and method of manufacturing the sam

Tzeng, Y-H., 1800, Patent No. I472642

Research output: Patent

METHOD OF DIAMOND GROWTH

Tzeng, Y-H., 1800, Patent No. I447253

Research output: Patent

METHOD OF DIAMOND NUCLEATION

Tzeng, Y-H., 1800, Patent No. I415965

Research output: Patent

METHOD OF DIAMOND NUCLEATION

Tzeng, Y-H., 1800, Patent No. I429779

Research output: Patent

Method of transferring a graphene film

Tzeng, Y-H., 1800, Patent No. 9181100

Research output: Patent

Graphite
Patents and inventions
Substrates

Method of transferring a graphene film

Tzeng, Y-H., 1800, Patent No. I439374

Research output: Patent

Snowflake-like Graphene and a method of synthesizing the same

Tzeng, Y-H., 1800, Patent No. I466823

Research output: Patent

鑽石成核方法及其所形成之結構

Tzeng, Y-H., 1800, Patent No. I546425

Research output: Patent