Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 99-08-01 → 00-07-31 |
介電層之化學機械拋光漿料與製程設計-II-子計畫三:積體電路製程中介電層薄膜之材料特性與化學機械拋光之研究〔II〕
- 陳, 貞夙 (PI)
Project: Research project
Project: Research project
| Status | Finished |
|---|---|
| Effective start/end date | 99-08-01 → 00-07-31 |