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以RIE方法研製多層 -摻雜型之磷化銦鎵/砷化銦鎵高電子移動率功率元件
Chang, Shoou-Jinn
(PI)
Master Degree Program on Nano-Integrated-Circuit Engineering
Project
:
Research project
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Project Details
Status
Finished
Effective start/end date
97-08-01
→
98-07-31
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