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應用低/高孔隙率多孔矽結構於電容式壓力感測器與高Q值ON-CHIP電感之研製(2/2)
Wang, Shui-Jinn
(PI)
Institute of Microelectronics
Project
:
Research project
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Project Details
Status
Finished
Effective start/end date
00-08-01
→
01-07-31
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