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磁控濺鍍機的建立及用於矽元件新材料的開發:矽化鈷藉由氧化物調節磊晶成長法的形成法的形成機制與氮化鋯擴
Liu, Chuan-Pu
(PI)
Master Degree Program on Nano-Integrated-Circuit Engineering
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:
Research project
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Project Details
Status
Finished
Effective start/end date
00-12-01
→
01-10-31
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