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聚焦離子束配合選擇性化學蝕刻製作 GaN/InGaN 奈米柱之可行性研究
Liu, Chuan-Pu
(PI)
Master Degree Program on Nano-Integrated-Circuit Engineering
Project
:
Research project
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Project Details
Status
Finished
Effective start/end date
07-07-01
→
08-02-28
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