以薄膜層進行銅導線晶片之銲線製程方法

Yeau-Ren Jeng (Inventor), 邱 桑茂 (Inventor)

Research output: Patent

Original languageChinese (Traditional)
Patent numberI236078
IPCH01L-021/60
Priority date24-03-25
Filing date04-03-26
Publication statusPublished - 2005 Jul 11

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