| Original language | Chinese (Traditional) |
|---|---|
| Patent number | I275442 |
| IPC | B24B-001/04 |
| Priority date | 24-10-10 |
| Filing date | 04-10-11 |
| Publication status | Published - 2007 Mar 11 |
超音波低應力精密拋光系統
賴 哲雄 (Inventor), Yeau-Ren Jeng (Inventor), 蔡 孟勳 (Inventor), 范 陽鑑 (Inventor), 王 鎰興 (Inventor), 潘 文玨 (Inventor)
Research output: Patent