Original language | Chinese (Traditional) |
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Patent number | I275442 |
IPC | B24B-001/04 |
Priority date | 24-10-10 |
Filing date | 04-10-11 |
Publication status | Published - 2007 Mar 11 |
超音波低應力精密拋光系統
賴 哲雄 (Inventor), Yeau-Ren Jeng (Inventor), 蔡 孟勳 (Inventor), 范 陽鑑 (Inventor), 王 鎰興 (Inventor), 潘 文玨 (Inventor)
Research output: Patent