超音波低應力精密拋光系統

賴 哲雄 (Inventor), Yeau-Ren Jeng (Inventor), 蔡 孟勳 (Inventor), 范 陽鑑 (Inventor), 王 鎰興 (Inventor), 潘 文玨 (Inventor)

Research output: Patent

Original languageChinese (Traditional)
Patent numberI275442
IPCB24B-001/04
Priority date24-10-10
Filing date04-10-11
Publication statusPublished - 2007 Mar 11

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