退火在二氧化矽/砷化鎵薄膜奈米壓痕行為上之效應分析

Translated title of the contribution: Nanoindentation Behaviour of As-Deposited and Annealed SiO2/GaAs Thin Films

Woei Shyan Lee, Wilbert Chu

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science