Abstract
We propose “the external reflectance versus height conversion (ERHC) method” for measuring the full-field three-dimensional surface topography of a sample height from one micron to 100 micrometers. It is similar to the camera method, capturing images reflected and/or not from a prism by using a lens and a CCD. The reflectance of a point in the image can be converted to the height of the point. The method can obtain large-area full-field real-time three-dimensional measurement results and has the advantages of simple operation, low cost, and easy assembly. The measurement area is in the range of a few square millimeters for each time. The lateral and vertical resolutions are 2 and 0.1 micrometers, respectively, and the error is about 1% compared with the confocal microscope.
Original language | English |
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Pages (from-to) | 1154-1162 |
Number of pages | 9 |
Journal | OSA Continuum |
Volume | 3 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2020 May 15 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering