2×2 thermo-optic silicon oxynitride optical switch based on the integrated multimode interference waveguides

R. W. Chuang; Zhen Liang Liao

doi:10.1149/1.3263273

2×2 thermo-optic silicon oxynitride optical switch based on the integrated multimode interference waveguides

R. W. Chuang, Zhen Liang Liao

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

A multistage SiO₂ /SiON/ SiO₂ 2×2 optical switch utilizing the multimode interference effect is proposed. The entire switching is realized based on the thermo-optic effect of SiO₂ /SiON dielectric layers. The heating power required to switch the optical beam from bar to cross state is determined to be ∼0.82 W. The highest extinction coefficient achieved during the optical switching between bar and cross output channels is in excess of 13 dB. Furthermore, the experimental results show that the rise and fall times of this device measured approximately 360 and 395 μs, respectively.

Original language	English
Pages (from-to)	H149-H152
Journal	Journal of the Electrochemical Society
Volume	157
Issue number	2
DOIs	https://doi.org/10.1149/1.3263273
Publication status	Published - 2010

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1149/1.3263273

Cite this

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abstract = "A multistage SiO2 /SiON/ SiO2 2×2 optical switch utilizing the multimode interference effect is proposed. The entire switching is realized based on the thermo-optic effect of SiO2 /SiON dielectric layers. The heating power required to switch the optical beam from bar to cross state is determined to be ∼0.82 W. The highest extinction coefficient achieved during the optical switching between bar and cross output channels is in excess of 13 dB. Furthermore, the experimental results show that the rise and fall times of this device measured approximately 360 and 395 μs, respectively.",

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AU - Chuang, R. W.

AU - Liao, Zhen Liang

PY - 2010

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N2 - A multistage SiO2 /SiON/ SiO2 2×2 optical switch utilizing the multimode interference effect is proposed. The entire switching is realized based on the thermo-optic effect of SiO2 /SiON dielectric layers. The heating power required to switch the optical beam from bar to cross state is determined to be ∼0.82 W. The highest extinction coefficient achieved during the optical switching between bar and cross output channels is in excess of 13 dB. Furthermore, the experimental results show that the rise and fall times of this device measured approximately 360 and 395 μs, respectively.

AB - A multistage SiO2 /SiON/ SiO2 2×2 optical switch utilizing the multimode interference effect is proposed. The entire switching is realized based on the thermo-optic effect of SiO2 /SiON dielectric layers. The heating power required to switch the optical beam from bar to cross state is determined to be ∼0.82 W. The highest extinction coefficient achieved during the optical switching between bar and cross output channels is in excess of 13 dB. Furthermore, the experimental results show that the rise and fall times of this device measured approximately 360 and 395 μs, respectively.

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2×2 thermo-optic silicon oxynitride optical switch based on the integrated multimode interference waveguides

Abstract

All Science Journal Classification (ASJC) codes

UN SDGs

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