72.3: Protrusive interception for TFT-LCDs using side-view illumination method

Fu Ming Tzu, Jung Hua Chou

Research output: Contribution to journalArticlepeer-review

Abstract

An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high-value photo-mask from damage.

Original languageEnglish
Pages (from-to)1077-1079
Number of pages3
JournalDigest of Technical Papers - SID International Symposium
Volume41 1
DOIs
Publication statusPublished - 2010 May

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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