72.3: Protrusive interception for TFT-LCDs using side-view illumination method

Fu Ming Tzu; Jung Hua Chou

doi:10.1889/1.3499839

72.3: Protrusive interception for TFT-LCDs using side-view illumination method

Fu Ming Tzu, Jung Hua Chou

Department of Engineering Science

Research output: Contribution to journal › Article › peer-review

Abstract

An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high-value photo-mask from damage.

Original language	English
Pages (from-to)	1077-1079
Number of pages	3
Journal	Digest of Technical Papers - SID International Symposium
Volume	41 1
DOIs	https://doi.org/10.1889/1.3499839
Publication status	Published - 2010 May

All Science Journal Classification (ASJC) codes

Engineering(all)

Access to Document

10.1889/1.3499839

Cite this

@article{1d6bcdb383934bfe815422d5bcf89d0c,

title = "72.3: Protrusive interception for TFT-LCDs using side-view illumination method",

abstract = "An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high-value photo-mask from damage.",

author = "Tzu, {Fu Ming} and Chou, {Jung Hua}",

year = "2010",

month = may,

doi = "10.1889/1.3499839",

language = "English",

volume = "41 1",

pages = "1077--1079",

journal = "Digest of Technical Papers - SID International Symposium",

issn = "0097-966X",

}

TY - JOUR

T1 - 72.3

T2 - Protrusive interception for TFT-LCDs using side-view illumination method

AU - Tzu, Fu Ming

AU - Chou, Jung Hua

PY - 2010/5

Y1 - 2010/5

N2 - An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high-value photo-mask from damage.

AB - An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high-value photo-mask from damage.

UR - http://www.scopus.com/inward/record.url?scp=84863314372&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863314372&partnerID=8YFLogxK

U2 - 10.1889/1.3499839

DO - 10.1889/1.3499839

M3 - Article

AN - SCOPUS:84863314372

SN - 0097-966X

VL - 41 1

SP - 1077

EP - 1079

JO - Digest of Technical Papers - SID International Symposium

JF - Digest of Technical Papers - SID International Symposium

ER -

72.3: Protrusive interception for TFT-LCDs using side-view illumination method

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this