A ball valve micro-pump based on axially symmetrical nozzle fabricated by excimer laser micromachining technology

Hung Liang Chien, Yung-Chun Lee

Research output: Contribution to journalArticle

Abstract

This paper presents a new type of ball valve micro-pumps with much simplified structure design and excellent performance. The key element in this micro-pump is a pair of ball valves implemented by confining a micro-ball within a nozzle. The nozzles are axially symmetrical with a specifically designed profile and are directly fabricated using excimer laser micromachining approaches. The ball valves are integrated with a flow chamber, an electromagnetically actuated PDMS membrane, and a coil. When passing an alternative current (AC) through the coil, the flow chamber is actuated to pump fluid flowing along one direction which is controlled by the ball valves. The performance of the proposed micro-pump is evaluated using an AC voltage in the range of 2-6 V and a frequency of 10-70 Hz. Experimental results show that a maximum flow rate of 389 μL/min and a maximum back pressure of 423 mm-H2O are achieved. It offers a low-cost, simple, and effective solution for a wide range of microfluidic pumping applications.

Original languageEnglish
Pages (from-to)1315-1320
Number of pages6
JournalInternational Journal of Precision Engineering and Manufacturing
Volume18
Issue number10
DOIs
Publication statusPublished - 2017 Oct 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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