A batch fabrication micro-ball array for optical coupling in free space communication

Sheng-Chih Shen, H. P. Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by which can improve appropriate distance for optical fiber coupling. The silicon-based optical coupling platform consists of the self-parking framework (including flat-topped mesa and intersection of two v-grooves) and micro-ball lens array for optical fiber coupling purpose. The structure of optical coupling platform is able to improve distance between fiber and micro-ball lens and to increase coupling efficiency. Optical measurement reveals an insertion loss below 2.5dB with wavelength 635nm in single-mode fiber. The micro-ball lens array is batch fabricated by polymeric material and thick photoresist, and then bonded them onto flat-topped mesa correspondently that adjoins to the v-groove. The corner compensation offers a method to fabricate flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens, but also reduces micro-assembly cost.

Original languageEnglish
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2001
EditorsA.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Number of pages7
Publication statusPublished - 2001 Dec 1
Event2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
Duration: 2001 Nov 112001 Nov 16

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)


Other2001 ASME International Mechanical Engineering Congress and Exposition
Country/TerritoryUnited States
CityNew York, NY

All Science Journal Classification (ASJC) codes

  • General Engineering


Dive into the research topics of 'A batch fabrication micro-ball array for optical coupling in free space communication'. Together they form a unique fingerprint.

Cite this