@inproceedings{7c382df93b174e6685eb79fde6f656cd,
title = "A batch fabrication micro-ball array for optical coupling in free space communication",
abstract = "The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by which can improve appropriate distance for optical fiber coupling. The silicon-based optical coupling platform consists of the self-parking framework (including flat-topped mesa and intersection of two v-grooves) and micro-ball lens array for optical fiber coupling purpose. The structure of optical coupling platform is able to improve distance between fiber and micro-ball lens and to increase coupling efficiency. Optical measurement reveals an insertion loss below 2.5dB with wavelength 635nm in single-mode fiber. The micro-ball lens array is batch fabricated by polymeric material and thick photoresist, and then bonded them onto flat-topped mesa correspondently that adjoins to the v-groove. The corner compensation offers a method to fabricate flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens, but also reduces micro-assembly cost.",
author = "Sheng-Chih Shen and Chou, {H. P.}",
year = "2001",
month = dec,
day = "1",
language = "English",
isbn = "0791835553",
series = "American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)",
pages = "851--857",
editor = "A.L. Lee and J. Simon and K. Breuer and S. Chen and R.S. Keynton and A. Malshe and J.-I. Mou and M. Dunn",
booktitle = "Micro-Electro-Mechanical Systems (MEMS) - 2001",
note = "2001 ASME International Mechanical Engineering Congress and Exposition ; Conference date: 11-11-2001 Through 16-11-2001",
}