A Bifacial SnO2 Thin-Film Ethanol Gas Sensor

C. L. Lu, S. J. Chang, T. C. Weng, T. J. Hsueh

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.

Original languageEnglish
Pages (from-to)1223-1225
Number of pages3
JournalIEEE Electron Device Letters
Volume39
Issue number8
DOIs
Publication statusPublished - 2018 Aug

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'A Bifacial SnO<sub>2</sub> Thin-Film Ethanol Gas Sensor'. Together they form a unique fingerprint.

Cite this