A Bifacial SnO2 Thin-Film Ethanol Gas Sensor

C. L. Lu; S. J. Chang; T. C. Weng; T. J. Hsueh

doi:10.1109/LED.2018.2846807

A Bifacial SnO₂ Thin-Film Ethanol Gas Sensor

C. L. Lu, S. J. Chang, T. C. Weng, T. J. Hsueh

Institute of Microelectronics

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

This letter produces a bifacial SnO₂ thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO₂ film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO₂ is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO₂ than a single-sided sensing layer, at an optimum working temperature of 200°C.

Original language	English
Pages (from-to)	1223-1225
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	39
Issue number	8
DOIs	https://doi.org/10.1109/LED.2018.2846807
Publication status	Published - 2018 Aug

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/LED.2018.2846807

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title = "A Bifacial SnO2 Thin-Film Ethanol Gas Sensor",

abstract = "This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.",

author = "Lu, {C. L.} and Chang, {S. J.} and Weng, {T. C.} and Hsueh, {T. J.}",

note = "Funding Information: Manuscript received May 25, 2018; revised May 30, 2018; accepted June 1, 2018. Date of publication June 13, 2018; date of current version July 24, 2018. This work was supported in part by the Ministry of Science and Technology, Taiwan, under Grant 106-2221-E-992-372-MY3, and in part by the National Nano Devices Laboratories, Tainan, Taiwan. The review of this letter was arranged by Editor E. A. Guti{\'e}rrez-D. (Corresponding author: T. J. Hsueh.) C. L. Lu, S. J. Chang, and T. C. Weng are with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, Tainan 701, Taiwan. Publisher Copyright: {\textcopyright} 2018 IEEE.",

year = "2018",

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doi = "10.1109/LED.2018.2846807",

language = "English",

volume = "39",

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AU - Lu, C. L.

AU - Chang, S. J.

AU - Weng, T. C.

AU - Hsueh, T. J.

N1 - Funding Information: Manuscript received May 25, 2018; revised May 30, 2018; accepted June 1, 2018. Date of publication June 13, 2018; date of current version July 24, 2018. This work was supported in part by the Ministry of Science and Technology, Taiwan, under Grant 106-2221-E-992-372-MY3, and in part by the National Nano Devices Laboratories, Tainan, Taiwan. The review of this letter was arranged by Editor E. A. Gutiérrez-D. (Corresponding author: T. J. Hsueh.) C. L. Lu, S. J. Chang, and T. C. Weng are with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, Tainan 701, Taiwan. Publisher Copyright: © 2018 IEEE.

PY - 2018/8

Y1 - 2018/8

N2 - This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.

AB - This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.

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JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

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A Bifacial SnO₂ Thin-Film Ethanol Gas Sensor

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