A Bifacial SnO2 Thin-Film Ethanol Gas Sensor

C. L. Lu, S. J. Chang, T. C. Weng, T. J. Hsueh

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.

Original languageEnglish
Pages (from-to)1223-1225
Number of pages3
JournalIEEE Electron Device Letters
Volume39
Issue number8
DOIs
Publication statusPublished - 2018 Aug

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Chemical sensors
Ethanol
Thin films
Thick films
Transducers
Electrodes
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Lu, C. L. ; Chang, S. J. ; Weng, T. C. ; Hsueh, T. J. / A Bifacial SnO2 Thin-Film Ethanol Gas Sensor. In: IEEE Electron Device Letters. 2018 ; Vol. 39, No. 8. pp. 1223-1225.
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A Bifacial SnO2 Thin-Film Ethanol Gas Sensor. / Lu, C. L.; Chang, S. J.; Weng, T. C.; Hsueh, T. J.

In: IEEE Electron Device Letters, Vol. 39, No. 8, 08.2018, p. 1223-1225.

Research output: Contribution to journalArticle

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