A bilayer Ti/Ag ohmic contact for highly doped n-type GaN films

J. D. Guo, C. I. Lin, M. S. Feng, F. M. Pan, G. C. Chi, C. T. Lee

Research output: Contribution to journalArticlepeer-review

71 Citations (Scopus)


Ohmic contacts with low resistance are fabricated on n-type GaN films using Ti/Ag bilayer metallization. The GaN films are grown by low pressure metalorganic chemical vapor deposition (LP-MOCVD) with Si as the dopant. Ohmic characteristics are studied for films with carrier concentration range from 1.5×1017 to 1.7×1019 cm-3. The lowest value for the specific contact resistivity of 6.5×10-5 cm2 is obtained without annealing. The barrier height of Ti on GaN is calculated to be 0.067 eV.

Original languageEnglish
Pages (from-to)235-237
Number of pages3
JournalApplied Physics Letters
Issue number2
Publication statusPublished - 1996 Dec 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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