A biosensor chip by CMOS process for surface stress measurement in bioanalyte

Shih-Ming Yang; T. I. Yin; C. Chang

doi:10.1016/j.snb.2006.10.008

A biosensor chip by CMOS process for surface stress measurement in bioanalyte

Shih-Ming Yang, T. I. Yin, C. Chang

Research output: Contribution to journal › Article

11 Citations (Scopus)

Abstract

A 1 cm × 1 cm biosensor chip of integrated piezoresistive microcantilevers and microchannel is developed by CMOS process. The 125 μm × 60 μm × 1.1 μm microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure in situ the surface stress change induced by biochemical reaction. The temperature drift in biosensing is minimized by operating in the static mode of surface stress measurement, and the intrinsic electrical noise is also effectively reduced by the parallel microcantilever design and on-chip signal conditioning circuit. The biosensor performance is validated by measuring the thiol-modified single strained DNA to demonstrate its measurement sensitivity.

Original language	English
Pages (from-to)	707-714
Number of pages	8
Journal	Sensors and Actuators, B: Chemical
Volume	123
Issue number	2
DOIs	https://doi.org/10.1016/j.snb.2006.10.008
Publication status	Published - 2007 May 21

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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Yang, S-M., Yin, T. I., & Chang, C. (2007). A biosensor chip by CMOS process for surface stress measurement in bioanalyte. Sensors and Actuators, B: Chemical, 123(2), 707-714. https://doi.org/10.1016/j.snb.2006.10.008

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