Abstract
A 1 cm × 1 cm biosensor chip of integrated piezoresistive microcantilevers and microchannel is developed by CMOS process. The 125 μm × 60 μm × 1.1 μm microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure in situ the surface stress change induced by biochemical reaction. The temperature drift in biosensing is minimized by operating in the static mode of surface stress measurement, and the intrinsic electrical noise is also effectively reduced by the parallel microcantilever design and on-chip signal conditioning circuit. The biosensor performance is validated by measuring the thiol-modified single strained DNA to demonstrate its measurement sensitivity.
| Original language | English |
|---|---|
| Pages (from-to) | 707-714 |
| Number of pages | 8 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 123 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2007 May 21 |
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All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Electrochemistry
- Electrical and Electronic Engineering
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A biosensor chip by CMOS process for surface stress measurement in bioanalyte. / Yang, Shih-Ming; Yin, T. I.; Chang, C.
In: Sensors and Actuators, B: Chemical, Vol. 123, No. 2, 21.05.2007, p. 707-714.Research output: Contribution to journal › Article
TY - JOUR
T1 - A biosensor chip by CMOS process for surface stress measurement in bioanalyte
AU - Yang, Shih-Ming
AU - Yin, T. I.
AU - Chang, C.
PY - 2007/5/21
Y1 - 2007/5/21
N2 - A 1 cm × 1 cm biosensor chip of integrated piezoresistive microcantilevers and microchannel is developed by CMOS process. The 125 μm × 60 μm × 1.1 μm microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure in situ the surface stress change induced by biochemical reaction. The temperature drift in biosensing is minimized by operating in the static mode of surface stress measurement, and the intrinsic electrical noise is also effectively reduced by the parallel microcantilever design and on-chip signal conditioning circuit. The biosensor performance is validated by measuring the thiol-modified single strained DNA to demonstrate its measurement sensitivity.
AB - A 1 cm × 1 cm biosensor chip of integrated piezoresistive microcantilevers and microchannel is developed by CMOS process. The 125 μm × 60 μm × 1.1 μm microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure in situ the surface stress change induced by biochemical reaction. The temperature drift in biosensing is minimized by operating in the static mode of surface stress measurement, and the intrinsic electrical noise is also effectively reduced by the parallel microcantilever design and on-chip signal conditioning circuit. The biosensor performance is validated by measuring the thiol-modified single strained DNA to demonstrate its measurement sensitivity.
UR - http://www.scopus.com/inward/record.url?scp=34247556429&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247556429&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2006.10.008
DO - 10.1016/j.snb.2006.10.008
M3 - Article
VL - 123
SP - 707
EP - 714
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
IS - 2
ER -