A biosensor chip by CMOS process for surface stress measurement in bioanalyte

Shih-Ming Yang, T. I. Yin, C. Chang

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A 1 cm × 1 cm biosensor chip of integrated piezoresistive microcantilevers and microchannel is developed by CMOS process. The 125 μm × 60 μm × 1.1 μm microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure in situ the surface stress change induced by biochemical reaction. The temperature drift in biosensing is minimized by operating in the static mode of surface stress measurement, and the intrinsic electrical noise is also effectively reduced by the parallel microcantilever design and on-chip signal conditioning circuit. The biosensor performance is validated by measuring the thiol-modified single strained DNA to demonstrate its measurement sensitivity.

Original languageEnglish
Pages (from-to)707-714
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume123
Issue number2
DOIs
Publication statusPublished - 2007 May 21

Fingerprint

stress measurement
Stress measurement
Surface measurement
bioinstrumentation
Biosensors
Insulation
CMOS
Signal conditioning circuits
chips
Microchannels
Sulfhydryl Compounds
insulation
DNA
conditioning
microchannels
thiols
surface layers
deoxyribonucleic acid
Temperature
temperature

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

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A biosensor chip by CMOS process for surface stress measurement in bioanalyte. / Yang, Shih-Ming; Yin, T. I.; Chang, C.

In: Sensors and Actuators, B: Chemical, Vol. 123, No. 2, 21.05.2007, p. 707-714.

Research output: Contribution to journalArticle

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