A comparative study of fin-last and fin-first SOI FinFETs

Darsen Lu, Josephine Chang, Michael A. Guillorn, Chung Hsun Lin, Jeffrey Johnson, Philip Oldiges, Ken Rim, Mukesh Khare, Wilfried Haensch

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science

Mathematics