A flexible ZnO nanowire-based humidity sensor

H. T. Hsueh, T. J. Hsueh, S. J. Chang, F. Y. Hung, C. L. Hsu, B. T. Dai, K. T. Lam, K. H. Wen

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


In this paper, the authors report the direct growth of ZnO nanowires (NWs) on a flexible substrate by the hydrothermal process and the fabrication of ZnO NW-based humidity sensor. It was found that average length and diameter of the ZnO NWs were 0.6 μm and 50nm, respectively. It was also found that resistance of the ZnO NWs decreased by 45% as we increased the relative humidity from 52% to 90%. Furthermore, it was found that measured resistance was very stable with negligible fluctuation after 16 days continuous testing.

Original languageEnglish
Article number6112160
Pages (from-to)520-525
Number of pages6
JournalIEEE Transactions on Nanotechnology
Issue number3
Publication statusPublished - 2012

All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Electrical and Electronic Engineering


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