A fully compatible CMOS-based hydrogen ion sensor using natural forming sensing membrane for urea detecting application

Ying Zong Juang, Chen Fu Lin, Hann Huei Tsai, Yan Kuin Su, Ruey Lue Wang, Wang Long Li, Po Cheng Kung

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

In this paper, it presents the fully CMOS compatible pH sensor device for detecting hydrogen ions. Without any deposition layer, the sensing membrane is formed naturally on the top of metal. To minimize the whole system size, the commercial Ag/AgCl electrode is replaced by gold electrode. The sensitivity is 215uA/pH by using gold electrode as reference electrode. The 0.1pH resolution could be achieved in both setups. The results showed the sensitivity and linearity are comparable by using commercial electrode or gold electrode as the reference electrode. This work demonstrates ISFET device with native aluminum oxide can detect the pH value during 6.9~8, which is suitable for the application of urea detection.

Original languageEnglish
Pages (from-to)1067-1070
Number of pages4
JournalProcedia Chemistry
Volume1
Issue number1
DOIs
Publication statusPublished - 2009 Sep 1
EventEurosensors 23rd Conference - Lausanne, Switzerland
Duration: 2009 Sep 62009 Sep 9

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)

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