A GaAs-based heterostructure field-effect transistor-type hydrogen sensor in air and N2 ambiances

  • C. W. Hung
  • , H. I. Chen
  • , T. H. Tsai
  • , L. Y. Chen
  • , K. Y. Chu
  • , W. C. Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An interesting hydrogen sensor based on the Pd/GaAs heterostructure field-effect transistor (HFET) is fabricated and investigated under various hydrogen concentrations in air and N2 environments. Experimentally, in nitrogen (air) ambiances, the studied sensor exhibits a hydrogen detection limit of 4.3 ppm H2/N2 (98 ppm H2/air) at 403 K, a high sensitivity of 1295 μA/mm-ppm H2/N2 (275.8 μA/mm-ppm H2/air) in 14 ppm H2/N2 (H 2/air) at 303 K, and a large initial rate of 774.4 (589.8) μA/s in 9970 ppm H2/N2 (H2/air) at 363 K. However, the studied sensor shows a longer recovery time in nitrogen than in air due to the lack of additional desorption process. From the experimental results, it is speculated that the oxygen in air occupies the adsorption sites and reduces the adsorbed hydrogen atoms at the Pd/GaAs interface.

Original languageEnglish
Title of host publicationIEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
Pages283-286
Number of pages4
DOIs
Publication statusPublished - 2007
EventIEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 - Tainan, Taiwan
Duration: 2007 Dec 202007 Dec 22

Publication series

NameIEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007

Other

OtherIEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
Country/TerritoryTaiwan
CityTainan
Period07-12-2007-12-22

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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