TY - GEN
T1 - A GaAs-based heterostructure field-effect transistor-type hydrogen sensor in air and N2 ambiances
AU - Hung, C. W.
AU - Chen, H. I.
AU - Tsai, T. H.
AU - Chen, L. Y.
AU - Chu, K. Y.
AU - Liu, W. C.
PY - 2007
Y1 - 2007
N2 - An interesting hydrogen sensor based on the Pd/GaAs heterostructure field-effect transistor (HFET) is fabricated and investigated under various hydrogen concentrations in air and N2 environments. Experimentally, in nitrogen (air) ambiances, the studied sensor exhibits a hydrogen detection limit of 4.3 ppm H2/N2 (98 ppm H2/air) at 403 K, a high sensitivity of 1295 μA/mm-ppm H2/N2 (275.8 μA/mm-ppm H2/air) in 14 ppm H2/N2 (H 2/air) at 303 K, and a large initial rate of 774.4 (589.8) μA/s in 9970 ppm H2/N2 (H2/air) at 363 K. However, the studied sensor shows a longer recovery time in nitrogen than in air due to the lack of additional desorption process. From the experimental results, it is speculated that the oxygen in air occupies the adsorption sites and reduces the adsorbed hydrogen atoms at the Pd/GaAs interface.
AB - An interesting hydrogen sensor based on the Pd/GaAs heterostructure field-effect transistor (HFET) is fabricated and investigated under various hydrogen concentrations in air and N2 environments. Experimentally, in nitrogen (air) ambiances, the studied sensor exhibits a hydrogen detection limit of 4.3 ppm H2/N2 (98 ppm H2/air) at 403 K, a high sensitivity of 1295 μA/mm-ppm H2/N2 (275.8 μA/mm-ppm H2/air) in 14 ppm H2/N2 (H 2/air) at 303 K, and a large initial rate of 774.4 (589.8) μA/s in 9970 ppm H2/N2 (H2/air) at 363 K. However, the studied sensor shows a longer recovery time in nitrogen than in air due to the lack of additional desorption process. From the experimental results, it is speculated that the oxygen in air occupies the adsorption sites and reduces the adsorbed hydrogen atoms at the Pd/GaAs interface.
UR - https://www.scopus.com/pages/publications/43049171863
UR - https://www.scopus.com/pages/publications/43049171863#tab=citedBy
U2 - 10.1109/EDSSC.2007.4450117
DO - 10.1109/EDSSC.2007.4450117
M3 - Conference contribution
AN - SCOPUS:43049171863
SN - 1424406374
SN - 9781424406371
T3 - IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
SP - 283
EP - 286
BT - IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
T2 - IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
Y2 - 20 December 2007 through 22 December 2007
ER -