A high-performance Pd nanoparticle (NP)/WO3 thin-film-based hydrogen sensor

Cheng Lee, Wen-Chau Liu

Research output: Contribution to journalArticle

Abstract

A new and high-performance Pd nanoparticle (NP)/WO3 thin-film-based sensor is fabricated by vacuum thermal evaporation (VTE) and RF sputtering herein. Based on the remarkable catalytic activity of Pd NPs and high-quality WO3 thin film (20 nm in thickness), excellent hydrogen sensing properties, including a very high sensing response of 1.8 × 104 (in 1000 ppm H2/air gas at 175°C), an extremely low detecting level (≤5 ppm H2/air), a relatively low optimal operating temperature of 175°C, and a fast sensing speed, are obtained. In addition, the studied Pd NP/WO3-based device shows the advantages of simple structure, low cost, and easy fabrication process. The studied device is, therefore, promising for high-performance hydrogen sensing applications.

Original languageEnglish
Article number8709960
Pages (from-to)1194-1197
Number of pages4
JournalIEEE Electron Device Letters
Volume40
Issue number7
DOIs
Publication statusPublished - 2019 Jul 1

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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