A high-speed low-voltage double-switch optical crossconnect using stress-induced bending micromirrors

Ju Nan Kuo, Gwo Bin Lee, Wen Fung Pan

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

A high-speed low-voltage double-switch electrostatically actuated optical crossconnect (OXC) is demonstrated using stress-induced bending micromirrors. A curved polysilicon seesaw structure substantially lowers the electrostatic operating voltage of the OXC and provides a double-switch option. Large mirror deflection angles of 13° (mirror elevation of 290 μm high) and 5° (cantilever deflection of 90 μm high), corresponding to low operating voltages of 25 and 18 V, could be obtained. A submillisecond switching time (<850 μs), a low optical insertion loss (0.65 dB), and a small polarization-dependent loss (<0.08 dB) are achieved.

Original languageEnglish
Pages (from-to)2042-2044
Number of pages3
JournalIEEE Photonics Technology Letters
Volume16
Issue number9
DOIs
Publication statusPublished - 2004 Sept

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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